基于激光干涉仪与自准直仪的平面镜轮廓高精度测量技术.pdf

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第49卷第17期
机槭工程学报
Vol49 No 17
2013年9月
JOURNAL OF MECHANICAL ENGINEERING
Sep
2013
DOI:10.3901/JME.2013.17052
基于激光干涉仪与自准直仪的平面镜
轮廓高精度測量技术
杨平1朱睿1郭隐彪′高增潔2
(1.厦门大学物理与机电工程学院厦门361005
2.东京大学精密工学系东京1138656日本)
摘要:基于三组激光干涉光路与一台自准直仪的光学扫描检测方法,开发可用于大尺寸平面镜二维轮廓的高精度测量技术。
通过联立线性方程式与最小二乘法结合的计算算法,可得到平面镜二维轮廓的测量结果及整个测量过程的不确定度值。利用
建模仿真整个测量过程,分析不同采样点数N下不确定度数值的变化趋势。此外,搭建基于高精度三坐标测量仪平台上的
光学检测系统,试验果表明该技术成功实现对100mm平面镜维轮廓的测量,并可实现重复性测量精度在±20nm范围内。
通过与Zygo白光干涉系统结果的比较,该检测技术可以实现纳米级别的测量精度。
关键词:激光干涉仪自准直仪大平面镜二维轮廓扫描检测
中图分类号:TH741
A High-precision Measurement Technique of Flat Mirror Profile
Comprising Interferometers and Autocollimator
YANG Ping ZHU Rui GUO Yinbiao TAKAMASU Kiyoshi 2
(1. School of Physics and Mechanical&Electrical Engineering, Xiamen University, Xiamen 361005
2 Department of Precision Engineering, The University of Tokyo, Tokyo 1138656, Japan)
Abstract An optical scanning technique comprising three laser interferometers and one autocollimator to measure a large flat mirror
profile with high accuracy is described. The flat mirror profile and its measurement uncertainty are reconstructed by an application of
multaneous linear equations and least-squares method. The whole measurement process is numerically modeled by the computer
simulation. Measurement uncertainties of the flat bar mirror profile are evaluated for different sampling numbers of the flat bar mirror
Moreover, a prototype of optical measurement system based on micro coordinate measuring machine platform is built. The
experiment shows that the measurement technique successfully achieves the profile measurement of 100 mm flat mirror and
repeatability of measurement accuracy within the range of 20 nm. Comparing with the results measured by Zygo whitelight
interferometer, this technique can achieve profile measurement in nanometer accuracy.
Key words: Laser interferometer Autocollimator Large flat mirror profile Scanning measurement
为满足高精度的检测需求,基于高精度光学仪
0前
器/元器件的扫描系统已被广泛地运用于工程计量
领域中叫。然而,大部分扫描系统普遍存在扫描平
随着超精密加工技术的发展,大型精密零部台的水平移动误差与旋转误差影响到整个系统的测
件,如光学元件、硅片以及液晶面板已经实现纳米量精度,因此在检测前对该类误差的测量和校正显
级别的加工精度。随之,对该类部件的表面几何形得必要。当前,运用激光干涉仪匹配专门的反射器
状(如直线度,平整度)检测需求也日益突出。
件可检测出相应的移动与旋转误差的。此外,高精
*国家自然科学基金(51075343)和国家知识产权局专利战略推进工程
度自准直仪也不断得到发展,并被广泛用于旋转误
(ps2012-015)资助项目。20121010收到初稿,20130624收到修改稿