电镀金刚石砂轮高效精密修整及熔融石英磨削试验研究.pdf

第49卷第23期
机械工程学报
Vol 49 No23
2013年12月
JOURNAL OF MECHANICAL ENGINEERING
D
2013
DOI:10.390I/JME.2013.23.174
电镀金刚石砂轮高效精密修整及
熔融石英黁削试验硏究
赵清亮赵玲玲!王字2孟琦2
(1.哈尔滨工业大学机电工程学院哈尔滨150001
2.上海机床厂有限公司上海200090
摘要:大尺寸光学玻璃元件主要采用细磨粒金刚石砂轮进行精密/超精密磨削加工,但存在砂轮修整频繁、工件表面面形精
度难以保证、加工效率低等缺点。采用大磨粒金刚石砂轮进行加工则具有磨削比大、工件面形精度高等优点,然而高效精密
的修整是其实现精密磨削的关键技术。采用Cr12钢对电镀金刚石砂轮(磨粒粒径151um)进行粗修整,借助修整区域聚集的热
量加快金刚石的磨损,可使砂轮的回转误差快速降至10um以内。结合在线电解修锐技术,采用杯形金刚石修整滚轮对粗修
整后的电镀砂轮进行精修整,砂轮的回转误差可达6um以内,轴向梯度误差由6um降至2.5m。通过对修整前后的金刚石砂
轮表面磨损形貌成像及其拉曼光谱曲线分析了修整的机理。对应于不同的砂轮修整阶段进行熔融石英光学玻璃削试验,结
果表明,砂轮回转误差较大时,工件材料表面以脆性断裂去除为主;随着砂轮回转误差和轴向梯度误差的减小,工件表面材
料以塑性去除为主,磨削表面粗糙度为R219.6nm,亚表层损伤深度低至2um。可见,经过精密修整的大磨粒电镀金刚石砂
轮可以实现对光学玻璃的精密磨削
关键词:电镀金刚石砂轮熔融石英高效修整精密磨削亚表层损伤
中图分类号:TH162
Hfigh Efficient Precision Conditioning of the Electroplated Diamond Wheel
and Grinding of Fused Silica Glasses
ZHAO Qingliang I ZHAO Lingling WANG Yu MENG Qi?
( School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001
2. Shanghai Machine Tool Works Ltd, Shanghai 200090)
Abstract: Generally, the fine abrasive diamond wheel is used to the precision/ultra-precision grinding of large-size optical glasses
but there re some disadvantages, such as the frequent wheel conditionin uncontrollable surface accuracy, and low processing
efiiciency. Coarse abrasive diamond wheel can implement a higher surface accuracy machining with large grinding ratio. However
to achieve precision grinding, efficient precision conditioning is very critical. The electroplated diamond grinding wheel(grit-size
151 wm )is rough trued using the Cr12 steel. The gathering heat speeds up the diamond wear, so the run-out error of grinding wheel is
quickly down to below 10 um Combined with lely in-process essn echnique(ID), cup-shaped diamond roller i
applied to precision condition the electroplated rinding wheel. The wheels run-out error drops to within 6 Hm, and the axial gradient
error is reduced from 6 um to 2. 5 wm. By the wheel wear morphology and the Raman spectral curve, the conditioning mechanism is
analyzed In different wheel truing stage, the fused silica is surface ground respectively. Using the high run-out error grinding wheel
the optical glass is mainly removed in the form of brittle fracture. When the run-out error and axial gr
well trued coarse abrasive grinding wheel can be considered for precision machining optical elemen( s radient error reduce, the fused
silica glass is ground mainly as plastic removal, with the surface roughness Ra19.6 nm and subsurf
crack depth 2 um. Thus, the
Key words: Electroplated diamond wheel Fused silica Efficient truing Precision grinding Subsurface damage
粗加工,半精加工,精密熖精密加工的工序来实现。
0前言
其中精密磨削主要采用细磨粒金刚石砂轮(树脂基
和金属基)进行,但存在砂轮磨损严重、修整频繁、
目前,光学玻璃的延展性磨削加工大多是采用加工效率低等缺点。若能用大磨粒金刚石砂轮进行
精密磨削,将大大降低砂轮磨损率,提高加工效率,
*国家科技重大专项资助项目(20112X04004051)。20121213收到初痛,
并减少加工成本。
20130904收到修改稿