基于三次样条插值的硅压阻式压力传感器的温度补偿.pdf

第28卷第7期
传感技术学报
Vol 28 No.7
2015年7月
CHINESE JOURNAL OF SENSORS AND ACTUATORS
July 2015
Temperature Compensation of Piezoresistive Pressure Sensor
Based on the Interpolation of Third Order Splines
WANG Bingbing, L Huaijiang
(Physics and Electronic Information College. Huaibei Normal University, Huaibei Anhui 235000, China)
Abstract: The thermal zero drift, the thermal sensitivity drift and non-linear error of piezoresistive pressure sensor
are the main factors of affecting the performance of sensors. So how to effectively compensate this kinds of errors to
improve its performance is significative. The temperature compensation method based on the interpolation of third or
der splines was presented. The traditional compensation method based on the interpolation of third order splines
was improved, to compensate zero drift, sensitivity drift and non-linear error respectively. This method was applied
for the temperature compensation of the experimental results of piezoresistive pressure sensor. The measuring range
the pressure sensor is 1 014 0x10 Pa 3.014 0x 10 Pa and the applied temperature range is-20 C
+60 C. By comparing the output signals by the sensor based on the traditional interpolation of third order splines
the effect about improved compensation method based on the interpolation of third order splines was better The pro
posed method can provide a valuable theoretical reference for the temperature compensation of the high precision
ressure sensors
Key words: sensor; temperature compensation; third order splines; non-linear error
EEACC: 7230
doi:10.3969/jisn.1004-1699.,2015.07.011
基于三次样条插值的硅压阻式压力
传感器的温度补偿
王冰冰,李淮江
(淮北师范大学物理与电子信息学院,安徽准北235000)
摘要:传感器的零点温度漂移、灵敏度温度漂移和非线性误差是影响传感器性能的主要因素,如何能使该类误差得到有效
补偿对于提高其性能有重要意义。提出了基于三次样条曲线插值的温度补偿方法,改进了传统三次样条曲线插值的补偿方
法,分别对传感器的零点、灵敏度以及非线性进行补偿,用这种方法对测压范围为1.0140×10°Pa~3.0140×10°Pa,温度范围
为-20℃~+60℃的硅压阻式压力传感器的实验标定结果进行了温度补偿。通过比较传统三次样条插值补偿后的传感器输出
信号,验证了使用改进后的三次样条曲线插值法的补偿效果更好。这种方法为高精度压力传感器的温度补偿提供了一…种有价
值的理论依据。
关键词:传感器;温度补偿;三次样条曲线插值;非线性误差
中图分类号:TP2120
文献标识码:A
文章编号:1004-1699(2015)07-1003-05
硅压阻式压力传感器利用半导体材料的压阻工程应用中,由于半导体的温度特性导致压阻系数
效应来进行压力测量,以其体积小、灵敏度高、工艺随温度变化,致使压力传感器的零点和灵敏度发生
成熟等优点,在各行业中得到了广泛应用。在实际漂移,从而影响传感器的性能和测量准确度2。对
项目来源:安徽省自然科学基金项目(1308085MF105);安徽省国际科技合作计划项目(10080703003);安徽省第七批“15”产
业创新团队皖人才2014j4号项目;安徽省高校自然科学研究重点项目(KJ2013A237);安徽省校企合作实践基地项
目(2012sid083)
收稿日期:2015-03-21
修改日期:2015-04-22