基于椭偏法的火棉胶薄膜光学参数测量.pdf

第34卷第1期
光学仪器
Vol 34, No. 1
2012年2月
OPTICAL INSTRUMENTS
February, 2012
文章编号:1005-56302012)01-0091-04
基于椭偏法的火棉胶薄膜光学参数测量
王海姣,王党社,乔若飞
(西安工业大学理学院,映西西安710032)
摘要:火棉胶醋酸戊脂溶液常被用于医学治疗,在分析材料内部结构时,利用火棉胶醋酸脂溶液
成膜后表现出的致密性和透光性,将其作为待分析材料的底膜,采用电子衍射的方法获得材料结
构。火棉胶薄膜的厚度及材料膜厚对电子衍射结果影响很大,采用光纤光语仪测量材料膜厚时需
要知道火棉胶薄膜的折射率和厚度。为获得不同体积火棉胶醋酸成脂溶液捞制的火棉胶薄膜的厚
度和折射率,利用椭偏原理,采用光谱反射型椭偏仪进行测量,拟合所建模型为 Rough/ Cauch
BK7。实验结果表明:该模型能够很好地表征薄膜结枃,并得到体积不同的火棉胶醋酸戊脂溶液所
捞制的薄膜厚度不同,体积也越大,火棉胶膜厚也越大, Cauchy系数A、BC系数基本相同
关键词:火棉胶;偏法;薄膜厚度;折射率
中图分类号:O484.5文献标识码:Adoi:10.3969/j.iss10055630.2012.01.018
Collodion film optical parameters measurement based on ellipsometry
WANG Haijiao, WANG Dangshe, QIAO Ruofei
( School of Science, Xi'an Technological University, Xian 710032, China
Abstract Collodion amyl acetate solution is often used in medical treatment In the analysis of inner
structure of materials, the compactness and light transmittance of collodion amyl acetate solution film
is used as the bottom film to obtain material structure together with the electron diffraction method.
Collodion film thickness and film thickness on electron diffraction have huge impact upon the result
When fiber optic spectrometer is used to measure the thickness of materials, collodion film refractive
index and thickness are needed to know. In order to obtain different volume collodion amyl acetate
solution for the collodion film thickness and refractive index, ellipsometric theory is employed here and
reflective ellipsometric spectroscopy is used for measurements. The resulting model is Rough/Cauchy/
K7. The results of the experiment show that the fitting model can well present the structure of the
thin film Besides, the volume of different collodion am l acetate solution for preparing film thickness is
different, the larger the volume, the greater the thickness of the collodion membrane, while Cauchy
coefficient A, B, C coefficient is basically the same.
Key words: collodion; ellipsometry; film thickness; refractive index
火棉胶在医学及工业中有广泛的用途,是制造清漆、胶片、人工珍珠、人造革的原料,在医学领域被用
于封堵创伤及灼烧的伤口,在组织学中常被用作组织的包理及切片剂。根据火棉胶的致密性,常被用
“收稿日期:2011-09-27
作者简介:王海姣(1987-),女,内蒙赤峰人,硕士研究生,主要从事蒸镀薄膜的电子衍射方面的研究
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