明∕暗场正置金相显微镜照明系统设计.pdf

第32卷第1期
光学仪器
2010年2月
OPTICAL INSTRUMENTS
February, 2010
文章编号:1005-5630(2010)01-0039-05
明/暗场正置金相显微镜照明系统设计
李弥高,古成昌,罗小英
(广州粤显光学仪器有限责任公司,广东广州510095)
摘要:明/暗场正置金相显徽镜是一种多用途的工业检测仪器,近年来应用领域越来越广泛。现
从暗场显微镜的光学原理入手,分析明/暗场正置金相显微镜照明系统的结构特点,提出照明系
统的结构方策,着重介绍落射式暗场聚光镜的设计方法,以实例的形式得到相应暗场聚光镜反
射面的主載面双曲线方程,并运用 PRO/ENGINEER的基准曲线创建功能,提出一种有效的曲
线创建与曲面加工方法。結果证明采用双曲面作为落射式暗场聚光镜的反射面能有效提高轴
外照明光東的利用率,设计与加工方法是可行的。
关键词:暗场显徽镜;照明系统;暗场聚光镜;双曲线方程;Pro/ ENGINEER
中图分类号:TH742.4文献标识码:Adoi:10.3969/.is5n.1005-5630.2010.01.009
Design of illuminating system in bright or dark field
upright metallurgical microscope
LI Migao, GU Chengchang, LUO Xiaoying
(Guangzhou Iiss Optical Instruments Co, Ltd., Guangzhou 510095, China)
Abstract The bright or dark field upright metallurgical microscope is a kind of multipurpose
industry check and measure instrument, this kind of microscope application field is more wider
in recent years. Beginned with the optical principle of dark field microscope, the structure
characteristics of illuminating system in bright or dark field microscope are analyzed. The
structure scheme of illuminating system is bringed forward. Emphatically introduce the design
method of reflected dark field condenser and obtain the hyperbolic equation of main section of
the reflected surface of dark field condenser in the design example, and bring forward the
method that creat datum curve and machining curved surface taking advantage of the function
of creating curve in Pro/ENGINEER. Results show that the off-axis illuminating beam
utilization factor is increased effectively when adopt the hyperboloid as the reflected surface of
reflected dark field condenser, the method of design and machining is practical.
words: dark field microscope; illuminating system; dark field condenser; hyperboloid
equation; Pro/ENGINEER
引言
已有一百多年历史的光学金相显微镜,由于它具有观察范围大、使用方便、设备成本低等优点,目前
仍然是生产和科学研究中最常用的一种工具。随着电子信息产业的快速发展,集成电路的集成度不断提
高,在线检测或非接触无电检测已成为产品制造过程中必不可少的工序,明/暗场正置金相显微镜特别适
收稿日期:2009-07-29
作者简介:李弥高(1975-),男,湖南邵东人,工程师,学士,主要从事光学显微镜设计方面的研究。
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