SEMI E24-92 (Reapproved 0699) CLUSTER TOOL MODULE INTERFACE.pdf

SEMI E24-92 (Reapproved 0699
CLUSTER TOOL MODULE NTERFACE: SOLATON VALVE
INTERLOCKS STANDARD
This standard was technically reapproved by the Global Physical Interfaces &Carriers Committee and is the
direcl responsibility o the North American Physical Interlaces &Carriers Committee. Current edition
rcapprovcd by thc North Amcrican Rcgional Standards Committcc on Fcbruary 28, 1999. Postcd on SEM
Onlinc April 1999, to bc published Junc 1999. Originally published in 1992
Minor editorial changes were made to this documcnt to conform to editorial guidclincs
1 ntroduction
33 nterlock Logic- The interlock is to consist of
two normally open relays and associated actuation
1. 1 Scope -This standard requires hardware inter-circuitry in each module (See Section R1-2)
locks that govern the opening and closing of the envi
ronmental isolation valve(s )at the interface planes of a
3.3.1 First Relay- One relay enables opening of the
cluster tool. This standard applies to all modules of a isolation valve of the attached module. Contact closure
cluster tool (as defined in SEMI E21)
cates a safe condition, enabling valve opening
Contact opening disables valve opening if the valve is
1.2 Purpose-the purpose of this standard is to closed. Contact opening does not cause the valve to
prevent any opening or closing of the isolation valve(s) close if the valve is open.(See Section R1-3)
rhich would result in an unsafe condition or possible
3.2 Second Relay-the other relay enables clost
damage to material or equipment
of the isolation valve of the attached module. Contact
1. 3 /- This standard requires cluster tool mod- closure indicates a safe condition, enablin valve
ule suppliers to implement the interlock and to define closure. Contact opening disables valve closure if the
the conditions that trip the interlock
valve is open. Contact opening does not cause the valve
open if the valve is clo
2 Referenced Documents
3.3.3 Monitoring -Situations can arise where the
2.1 Semdocumenis
module A interlock inhibits an operation of the valve on
SEMI E21
Cluster Tool Module Interface: module B, when that valve is already in the inhibited
Mechanical Interface and Wafer Transport Standard
condition. This potential conflict must be detected and
resolved within module B (See Section Rl-3
2.2 Other Documenis
3.4 Contac/ Raling -The relay contacts shall be rated
MIL-C-26500E
Specification for
for a minimum of 1 A at 24 VDC
Connectors -General Purpose, Electrical, Miniature
Circular. Environmental Resisting
3.5 Wiring -Copper wire used in the interlock circuit
shall be 0.82 mm cross section(18 AWG)or larger
3 Requirements
lock Connectors -Metal shell bayonet-type
3.1 Interlock Provision and Use- Each module connectors are specified per MIL-C-26500E as follows
Joined to another module, across a common interface MS24265R18B1ISN panel mounted receptacles on
Dlane (as defined in SEMI E21), must provide a fail. each of the modules and MS24266R18B11PN plugs
safe interlock that enables opening and closing of the terminating each end of the cable which interconnects
isolation valve of the other mocule. Each module that
the interlock receptacles of two connected modules
has an isolation valve must use the inter