SEMI E54.9-1000 SPECIFICATION FOR SENSORACTUATOR NETWORK.pdf
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SEMI E54.9-1000
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK
COMMUNICATION FOR MODBUS/TCP OVER TCP/IP
This specification was technically approved by the Global Information and Control Committee and is the
direct responsibility of the North American In ormation and Control Committee. Current edition approved by
Scptcmbcr2000tobcpublishedOctobcr2000.OriginallypublishedFcbruary20Rilablcatwww.scmi.org
hc North Amcrican Rcgional Standards Committcc on July 14, 2000. nitially av
Device Model(CDM)and appropriate Specific Device
1 Purpose
dels (SDMS ), for the Modbus/TCP prot
1.1 This standard defines a communication TCP/P network
specication based on the Modbus/CP protocol over a 2, 3 This document is used in conjunction with a SEM
Transmission Control Protocol/Internet Protoco
standard SAN Common Device Model specification
(TCP/IP)network to enable communications between one or more SEMI standard Specific Device Model
intelligent devices on a sensor/actuator network(SAN
SDM)specifications(e%, for a mass flow device), the
that operate according to SEMI specified device models Modicon Modbus Protoco
eference Guide and th
common and device specific)in a semiconductor Open Modbus/TCP Specification. Together, they
manutacturing too
describe the Modbus/TCP protocol, the externall
1. 2 Background and Motivation
visible data structures and behaviors of devices utilizing
1. 2. I Modbus/TCP over TCP/IP is a component level
the Modbus/TCP networking capability in a SEMI
compliant SAN system
network which provides a simple, inexpensive, and fast
means of exchanging data among control level
2.4 This standard does not purport to address safety
industrial devices(.g, sensors and actuators)and issues, if any, associated with its use. It is the
higher level devices such as controllers. Modbus/TCP responsibility of the users of this standard to establish
over TCP/IP provides
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use
A solution to low-level device networking
Access to intelligence present in low-level devices
3 Limitations
Networking between higher level controllers, and
This document specifies a semiconductor
equipment SAN based solely on Modbus/TCP over a
o Master/Slave and Peer-to-peer communication TCP/P network and is a companion document to the
capabilities
Open Modbus/TCP Specification; thus a complete
specification of this standard necessarily includes the
2. 2 Modbus/TCP specifies a comm unication model
and protocol. The Physical, Data Link, and Network
Modbus/TCP and Modbus protocol specifications
There are other semiconductor equipment SAN
Layer definitions are defined by the network in which communications options. The specifications for these
the Modbus/TCP protocol is embedded such as TCP/P
options are not included here
Ethernet
1. 2.3 This document enables commu nications between
3.2 This standard specifies enhanc ements that provide
additional capabilities over and above those currently
intelligent devices on a SEMI compliant SAN by required by Modbus/TCP. I order to avoid document
providing a presentation mapping of common and
specific device network visible structure and behavior cons展开阅读全文

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