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类型SEMI E54.9-1000 SPECIFICATION FOR SENSORACTUATOR NETWORK.pdf

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    SEMI E54.9-1000 SPECIFICATION FOR SENSORACTUATOR NETWORK E54 1000
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    sem
    SEMI E54.9-1000
    SPECIFICATION FOR SENSOR/ACTUATOR NETWORK
    COMMUNICATION FOR MODBUS/TCP OVER TCP/IP
    This specification was technically approved by the Global Information and Control Committee and is the
    direct responsibility of the North American In ormation and Control Committee. Current edition approved by
    Scptcmbcr2000tobcpublishedOctobcr2000.OriginallypublishedFcbruary20Rilablcatwww.scmi.org
    hc North Amcrican Rcgional Standards Committcc on July 14, 2000. nitially av
    Device Model(CDM)and appropriate Specific Device
    1 Purpose
    dels (SDMS ), for the Modbus/TCP prot
    1.1 This standard defines a communication TCP/P network
    specication based on the Modbus/CP protocol over a 2, 3 This document is used in conjunction with a SEM
    Transmission Control Protocol/Internet Protoco
    standard SAN Common Device Model specification
    (TCP/IP)network to enable communications between one or more SEMI standard Specific Device Model
    intelligent devices on a sensor/actuator network(SAN
    SDM)specifications(e%, for a mass flow device), the
    that operate according to SEMI specified device models Modicon Modbus Protoco
    eference Guide and th
    common and device specific)in a semiconductor Open Modbus/TCP Specification. Together, they
    manutacturing too
    describe the Modbus/TCP protocol, the externall
    1. 2 Background and Motivation
    visible data structures and behaviors of devices utilizing
    1. 2. I Modbus/TCP over TCP/IP is a component level
    the Modbus/TCP networking capability in a SEMI
    compliant SAN system
    network which provides a simple, inexpensive, and fast
    means of exchanging data among control level
    2.4 This standard does not purport to address safety
    industrial devices(.g, sensors and actuators)and issues, if any, associated with its use. It is the
    higher level devices such as controllers. Modbus/TCP responsibility of the users of this standard to establish
    over TCP/IP provides
    appropriate safety and health practices and determine
    the applicability of regulatory limitations prior to use
    A solution to low-level device networking
    Access to intelligence present in low-level devices
    3 Limitations
    Networking between higher level controllers, and
    This document specifies a semiconductor
    equipment SAN based solely on Modbus/TCP over a
    o Master/Slave and Peer-to-peer communication TCP/P network and is a companion document to the
    capabilities
    Open Modbus/TCP Specification; thus a complete
    specification of this standard necessarily includes the
    2. 2 Modbus/TCP specifies a comm unication model
    and protocol. The Physical, Data Link, and Network
    Modbus/TCP and Modbus protocol specifications
    There are other semiconductor equipment SAN
    Layer definitions are defined by the network in which communications options. The specifications for these
    the Modbus/TCP protocol is embedded such as TCP/P
    options are not included here
    Ethernet
    1. 2.3 This document enables commu nications between
    3.2 This standard specifies enhanc ements that provide
    additional capabilities over and above those currently
    intelligent devices on a SEMI compliant SAN by required by Modbus/TCP. I order to avoid document
    providing a presentation mapping of common and
    specific device network visible structure and behavior cons
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