SEMI E64-0600 SPECIFICATION FOR 300 mm CART TO SEMI E15.1 DOCKING.pdf

SEMI E64-0600
SPECIF CATON FOR 300 mm CART TO SEM E15,1 DOCKNG
INTERFACE PORT
This specification was technically approved by the Global Physical Interfaces Carriers Committee and is
the direct responsibility of the North American Physical Interlaces Carriers Committee. Current edition
approvcd by the North Amcrican Rcgional Standards Commitcc on April 10, 2000. Initially availablc on
SEMI Onlinc April 000 to bc published Junc 2000. Originally published in 1997, prcviously publishd
June 1998
1 Purpose
5.2 carrier-any cassette, box, pod, or boat that
II This specification defines a sta ndard location on
contains wafers(per SEMI E15
SEMI El5.L-compliant tools and requirements to be 5.3 carm-a floor-based carrier transfer vehicle
used for installing a docking interface for carrier
transport carts. It is intended to promote a consistent
4 docking -The act of locating a floor-based
interface location between carrier transport carts and
carrier transport vehicle for carrier transfer to/from
SEMI E15. 1-compllant wafer process or Inspection equipment
equlpment
5.5 load face plane-the furthes t physical vertical
boundary plane from carrier centroid on the side(s) of
2 Scope
ipment where loading of th
2.1 This standard covers 300 mm SEMI E15
SEMI El5
compliant tools only. Similar requirements fo
5.6 load por- The interface location on a tool where
tools are not defined here
carriers are placed to allow the tool to process wafers
2 This standard does not purport to address safety (per SEMI El5)
issues, if any, associated with its use. It is the 5.7 manal docking-contact motion controlled by
responsibility of the users of this standard to establish
the operator of the cart
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use
5.8 transfer -To either load or unload (per SEMI
E15)
Limitations
3. 1 This standard does not define interface function-
6 Requirements
ality, lead-in, accuracy, carrier transfer, compliance, 6.1 The following exclusion volume is reserved on
impact, or vibration restrictions. Cart and docking SEMI El5.1-compliant tools for the installation of a
interface designs should comprehend physical limita-docking interface device. This volume is referred to as
tions of tools to which they are being applied
Zone L
4 Referenced Standard
6.1.1 Interface Zone 1
volume, just above floor
level reserved in SEMI E15. 1 for installation of a
4.1 SEMI Standards
contact docking device
SEMI E15- Specification for Tool Load Port
6.1.1.1 The vertical bounds of Zone L are defined by
SEMI E15. I -Specification for 300 mm Tool Load the floor from which Dimension H is measured in
Port
SEMI E15. 1 and the Height Lh, per Table
SEMI E23 - Specification for Cassette Transfer
6. 1. 1. 2 The depth of Zone L into the tool is Ld
Parallel I/O Interface
measured from the load face plane as defined in SEMT
E15.1
NOTE 1 As listed or revised. all documcnts citcd shall bc the
latest publicalions of adoptcd standards
6.1.1.3 The width of Zone L, Lw, is the full width of
the tool measured at the load face plane
5 Terminology
6 1,14 A device mounted in Zone L is to be
5.1 automati