SEMI C3.12-94 STANDARD FOR AMMONIA (NH3) IN CYLINDERS.pdf

SEMI C3.12-94
STANDARD FOR AMMONIA(NH3)IN CYLINDERS, 99.998% QUALITY
1 Description
Detection Limits-25 ppb( mole/mole)carbon
Ammonia is a colorless, alkaline gas having a pungent monoxide, 30 ppb(mole/mole)oxygen, 0 ppb(mol
dor. Ammonia dissolves readily in water. It is shipped mole)nitrogen
as a liquified gas under its own vapor pressure. It is 4.1.2 Instr"ment Parameters
combustible
412.1 Columns
2 Specifications
QUALITY: 99. 998%(See Note 1)
Column 1: Hayesep A or equivalent, 100/120 mesh, 32.8
m(0 [1) by 3.2 mm(/8 in).085 ID
Column 2: Haycscp A or cquivalcnt, 100/120 mesh, 32.8
Manimzim Accentable
m by
anmn
C
Carbon monoxide ( CO)
4.122 Carrier Flow: 30 ml/min helium minimum of
99.9999% purity having a maximum of 40 ppb carbon
Hydrocarbons C1-C3
dioxide
Nitrogen (N2)
5
4.1.2.3 Sample Volume: 1.0 ML
Oxygen(02)
4 Temperatures
Watcr(H20)(V/)
Dctcctor
125C
TOTAL IMPURITIES
Columns
27"C
*An analysis of significant figurcs has not bccn considcrcd
Thc numbcr o! significant figures will bc based on analytical 4 1.2.5 Determine the breakdown voltage of the
accuracy and the precision of the providcd proccdurc
detector. Set operating voltage at 10 volts below break
3 Physical Constants(for information only
down
4.1.3 Calibration Standa
1-2 ppm(mole/mole
Metric Unit
T Units
le, 2-3 ppm (mole/mole) oxygen, 5-6
ppm (mole/mole)nitrogen, balance helium (having a
Molccular wcight
17.031
17.031
total of other impurities of less than I ppm)
Boiling point at I atm 334C
28.2°F
4.1. 4 Operaling Procedure
Densily or as al 0C32F) 0.771 kg/m 0.0481 1b/4.1. 4. 1 Set timing interval on sample select valve to
and I alm
10
Spccific gravity ofgas alo 0.597
0.597
4.1.4.2 Set timing interval on gas sampling valve to
and I atm (air=1)
3:30
Density of liquid at 21. C 608. 7 kg/m38.00 1b/t
70F)
4.1. 4.3 Set timing interval #3 to 4: 20 minutes
4.1.4.4 Do not change the initial sample flow setting
4 Analytical Procedures(See Notes 2, 3, 4, 5)
once established
4. 1 Carbon Monowide, Cygen and Nitrogen -This 4.1.4.5 Obtain a continuous flow of the calibration
procedure is for the determination of carbon monox
standard using a clean stainless steel line (02 in ID)
de, oxygen and nitrogen in ammonia using a gas chro
matograph with a helium ionization detector (See 4.1 4.6 Inject the calibration standard onto the precol
Note 6
umn with the gas sampling valve Record the retention
SEMI C3.12-940SEMI1982,1996