SEMI C32-0699 SPECIFICATION FOR METHYL ETHYL KETONE.pdf

SEMI C32-0699
SPECIFICATON FOR METHYL ETHYL KETONE
This spccification was technically approved by thc Global Proccss Chcmicals Committce and is the dircct
responsibility of thc North Amcrican Proccss Chemicals Committce. Current edition approvcd by the North
American Regional Standards Committee on April 23, 1999. Initially available on SEMI Online May 1999
to be published Junc 1999. This documcnt replaces SEM Cl11 in its cntircly. Originally published in
1978
1 Purpose
Column Temperature: 40C isothermal for 5 minutes
then programmed to 200"C at 10C/min
I The purpose of this document is to standardi
requirements for methyl ethyl ketone used in the
Injector Temperature
150°C
testing procedures
Dctcctor Tcmpcraturc
250C
ndards. Test methods have been shown
to give statistically valid results. This document al
Samplc Si
0.,2uL
or gra
Carrier Gas
Hclium at 3 mll/min
for which a need has been identified. In the case of the
Dctcctor
guidelines, the test methods may not have been
Conductivity
statistically validated yet
pproximate Retention Times(min)
2 Scope
Methyl Ethyl Ketone
9.0
2-butanol
10.5
2. 1 The scope of this document is all grades of meth
ethyl ketone used in the semiconductor industry
8.2 Color-dilute 3.0 ML of platinum-cobalt stock
solution (APHA No. 500 )to 100 ML with water
3 Limitations
Compare this standard (APHA No. 15)with 100 ml o
3.1 None
sample in Nessler tubes. View vertically over a white
background. The sample must be no darker than the
4 Referenced Documents
standard
SEMI CI- Specifications for Reagents
8.3 Acidily-to 25 ml of water in a glass-stoppered
flask, add 10 ml of sample and 0.1 ML of
5 Terminology
phenolphthalein indicator solution. Add 0.10 N sodium
hydroxide until a slight, pink color persists afte
5 1 None
shaking for one-half minute. Add 21 ml(17 g)of the
sample, mix wel, and titrate with 0.01 N sodium
6 Physical Property(for information only)
hydroxide until the pink color is reproduced. Not more
Density at25°C
0.80g/mL
than 3.0 ML of the sodium hydroxide solution should be
Boiling Point
79.6C
required
8. 4 Residue After vaporation- Evaporate 63 ML
7 Requirements
(50 g)of sample to dryness. Dry at 105C for 30
The requirements for methyl ethyl ketone for minutes, cool in a desiccator, and weigh(see SEMI CI
Grade I are listed in Table
Section 3.3. Determination of Residue After
Evaporation
8 Grade 1 Procedures
8.5 Water- Add 25 ml of pvridi ne-dichloromethane
8 1 ASS
Analyze the sample by gas mixture(I t 1)to a dry titration flask and add Karl
chromatography(see SEMT Cl, Section 3.1, Guidelines Fischer(K) reagent to a visually or electrometrically
by Wide Bore Col
determined endpoint that persists for 30 seconds. Add
Chromatography). The parameters cited have given
25 ML (20 g)of sample, taking care to protect the
satisfactory results
sample and contents of the flask from moisture. Stir
Column: 30 meter x 530 micron I D. fused silica
vigorously and titrate with Karl Fischer reagent to the
same endpoint
capillary, coated with 5 micron film of DB-1 or
equivalent (100% methyl silicone whic