SEMI C3.29-96 (Reapproved 0999) STANDARD FOR NITROGEN (N2),.pdf

S E M
SEMI C3.29-96(Reapproved 0999
STANDARD FOR NITROGEN (N2), BULK GASEOUS, 99.9995%
QUALITY
This standard was technically reapproved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Commiutcc on April 15, 1999. Initially availablc on SEMI Onlinc August 1999, to bc published Scpicmbcr
1999. Originally published in 1986: prcviously published in 1996
1 Description
4 Analytical Procedures(see Notes 2, 3)
1. 1 Nitrogen is an odorless, tastele ss, diatomic gas 4.1 Carbon Monoxide and Hydrog en
his
comprising approximately 78% of the earths procedure is for the determination of carbon monoxide
atmosphere, colorless liquid; chemically unreactive. and hydrogen in nitrogen using a gas chromatograph
Noncombustible, an asphyxiant gas; cryogenic Derived with a reduction gas detector(see Note 4)
from liquid air by fractional distillation
4. 1,1 Detection Li
2 ppb (mole/mole)carbon
2 Specifications
monoxide, 20 ppb (mole/mole) hydrogen
QUALITY: 99.9995%(see Note 1)
4. 12 stment Parameters
4.1.2.1 Column: 5A molecular sieve, 0.9 m(3 ft) by 3
Impurities
Maximum Acceptable Level
mm (1/4 in)SS, or equivalent
(PDm*リ
Carbon dioxide CO2)
4.1.2.2 Carrier Flow: 40 ml/min air or nitrogen
0.2
Carbon monoxide( CO)
4.1.2.3 Sample Volume: 2.0 ML
Hydrogen ( H>
4.1.2.4 Temperatures
Oxygen (02)
0.2
Detector
280°C
Particlcs
Column Oven
2509C
otal Hydrocarbons
0.2
cxprcsscd as Mcthanc
4.1.3 Calibration Standard- 1-5 ppm (mole/mole)
(THC)
carbon monoxide, 1-5 ppm (mole/mole)hydrogen ir
nitrogen
Watcr(H2O)(v/v)
0.2
OTAL IMPURITTES
4.8
4.1.4 Operaling Procedure
An analysis of significant figures has not been considered. The 4.1.4.1 Inject the calibration standard into the column
number o! sign licant ligures will be bascd on analytical accuracy and using a gas sampling valve. Record the retention times
nd peak areas. Order of elution is hydrogen, then
**To be determined between supplier and user
carbon monoxide. Run standard analysis in triplicate for
Physical Constants(for in formation only)
stability determination relative to purging of calibration
system components
Metric units
US Units
4.1.4.2 Inject the sample to be tested in same manner
calibration standard Record the retention times
Molecular weigl
28.013
28.013
and peak areas
Boiling poi
195.8°C
-320.4°F
ali
4.1.4.3 Repeat4.1.4.1
Density of gas at 1. 1605 kg/m.07245 Ib/n3
4.1.4.4C
avera
e ak are as of the
21.1C(70°F)
alibration standard to that of the nitre
ple bein
nd I atm
tested Calculate the concentrations of carbon monoxide
0.967
0.967
and hydrogen, using the formula below. The results
of gas at 21.1 C
may not exceed the specifications in Section 2 of this
Id I atm
lard
(air=1)
Density of liquid 8088kg/m3
50.49b/L3
at bolling point
SEMC3.29-96SEMI1986,1999