SEMI C3.58-0600 SPECIFICATION FOR OCTAFLUOROCYLOBUTANE,.pdf
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SEMI C3,58-0600
SPECIFICATION FOR OCTAFLUOROCYLOBUTANE, Cafas
ELECTRONIC GRADE IN CYLINDERS
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the European Gases Committee. Current edition approved by the European Regional Standards Committee on
April 4, 2000. Initially availablc on SEMI Onlinc May 2000; to bc published Junc 2000
1 Description
5. 12. 1 Three 8 X
flat bottomed test tubes
flexible tubing, flowmeter, pressure regulator
1 Octafluorocyclobutane. also known
perfluorocyclobutane, is a gas under normal 5.122 Redgents-0.02% methyl red solution, 0.0IN
hydrochloric acid, freshly distilled or deionized water
atmospheric conditions (15C and 760 mm H)
boiled to remove carbon dioxide
2 The gas is a non-flammable, non-toxic, colorless
and odorless gas which is stable under norma
5.1. 2. 2.1 0.02% methyl red: methyl red is
carboxybenzeneazodimethylaniline. This is the acid or
conditions
alcohol soluble form which shall be used Dissolve 20
2 Specifications
mg of methyl red (acid form) in a mixture of 7. 44 ML
of 0. 01M sodium hydroxide and 70 ML of alcohol and
Purity: 99. 99%
dilute to 100 ml with water, The alcoho must contain
not less than 95% V/y ethanol
Impurities
Maximum Acceptable Level
Nitrogen/Oxygen
50 ppm
5.1.2. 2.2 0.01M hydrochloric acid: dilute 103.0 g of
Moisture
hydrochloric acid solution (SG 1. 18)to 1000.0 ML with
water to give IM solution
Other halocarbons,
.cidity (as HF)
I ppm molc
5. 12.23 Dilute 10.0 ml of this solution to 1000.0 ml
R13 R23 R114 R113 RI1 and R116
with water to give 0.01 M solution
3 Referenced Standards
5. 1.2.2.4 Alternatively prepare by the dilution of a
commercially available standard solution
N
5.1.3 Operaling Pr
4 Physical Constants(for in formation only)
5.1.3.1 Attach a suitable regulator to the cylinder
Forma
C4 Fe or CF?CF2?CFCF
outlet
Molecular weight
200
5.1.3.2 Connect the flowmeter to the regulator using
Melling point
flexible tubing
Boiling point
115°C
5.1.3.3 Open the cylinder valve and purge the
Relative density, ga
6.9(air=l)
flowmeter with octafluorocyclobutane
I Relative density, liquid
1.6(water=I)
5 13 4 Pour 50 ml of carbon dioxide free water into
Vapor prcssurc20°C
2.7 bar
h of three 8 X one inch flat bottomed test tubes. Add
Appcarancc/Color
Colorless gas
0.1 ML of 0.02% solution of methyl red in alcohol to
none
each tube and label the tubes aband c? Add 0.1
nl of 0.01M hydrochloric acid to tube'b' and 0.2 ML
of 0.01M hydrochloric acid to tube. Pass a 23 liter
5 Analytical Procedures
gaseous sample of octafluorocyclobutane through the
I Acidity -TI
edure is for the determin
solution in tube b
of acidity in octafluorocyclobutane using a classical the test with the other two tubes. The intensity of the
chemical method of analysis, utilizing methyl red
color produced in,should be between those solutions
indicator
ndc. The formation of a pink color indicates
acidity. A yellow color will be produced by alkalinity
5.1. I Detection 1imit- I ppm as HF
5. 134.1 The colors of the test solutions befor展开阅读全文

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