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类型SEMI C3.58-0600 SPECIFICATION FOR OCTAFLUOROCYLOBUTANE,.pdf

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    SEMI C3.58-0600 SPECIFICATION FOR OCTAFLUOROCYLOBUTANE C3 58 0600 OCTAFLUOROCYLOBUTANE
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    SEMI C3,58-0600
    SPECIFICATION FOR OCTAFLUOROCYLOBUTANE, Cafas
    ELECTRONIC GRADE IN CYLINDERS
    This specification was technically approved by the Global Gases Committee and is the direct responsibility of
    the European Gases Committee. Current edition approved by the European Regional Standards Committee on
    April 4, 2000. Initially availablc on SEMI Onlinc May 2000; to bc published Junc 2000
    1 Description
    5. 12. 1 Three 8 X
    flat bottomed test tubes
    flexible tubing, flowmeter, pressure regulator
    1 Octafluorocyclobutane. also known
    perfluorocyclobutane, is a gas under normal 5.122 Redgents-0.02% methyl red solution, 0.0IN
    hydrochloric acid, freshly distilled or deionized water
    atmospheric conditions (15C and 760 mm H)
    boiled to remove carbon dioxide
    2 The gas is a non-flammable, non-toxic, colorless
    and odorless gas which is stable under norma
    5.1. 2. 2.1 0.02% methyl red: methyl red is
    carboxybenzeneazodimethylaniline. This is the acid or
    conditions
    alcohol soluble form which shall be used Dissolve 20
    2 Specifications
    mg of methyl red (acid form) in a mixture of 7. 44 ML
    of 0. 01M sodium hydroxide and 70 ML of alcohol and
    Purity: 99. 99%
    dilute to 100 ml with water, The alcoho must contain
    not less than 95% V/y ethanol
    Impurities
    Maximum Acceptable Level
    Nitrogen/Oxygen
    50 ppm
    5.1.2. 2.2 0.01M hydrochloric acid: dilute 103.0 g of
    Moisture
    hydrochloric acid solution (SG 1. 18)to 1000.0 ML with
    water to give IM solution
    Other halocarbons,
    .cidity (as HF)
    I ppm molc
    5. 12.23 Dilute 10.0 ml of this solution to 1000.0 ml
    R13 R23 R114 R113 RI1 and R116
    with water to give 0.01 M solution
    3 Referenced Standards
    5. 1.2.2.4 Alternatively prepare by the dilution of a
    commercially available standard solution
    N
    5.1.3 Operaling Pr
    4 Physical Constants(for in formation only)
    5.1.3.1 Attach a suitable regulator to the cylinder
    Forma
    C4 Fe or CF?CF2?CFCF
    outlet
    Molecular weight
    200
    5.1.3.2 Connect the flowmeter to the regulator using
    Melling point
    flexible tubing
    Boiling point
    115°C
    5.1.3.3 Open the cylinder valve and purge the
    Relative density, ga
    6.9(air=l)
    flowmeter with octafluorocyclobutane
    I Relative density, liquid
    1.6(water=I)
    5 13 4 Pour 50 ml of carbon dioxide free water into
    Vapor prcssurc20°C
    2.7 bar
    h of three 8 X one inch flat bottomed test tubes. Add
    Appcarancc/Color
    Colorless gas
    0.1 ML of 0.02% solution of methyl red in alcohol to
    none
    each tube and label the tubes aband c? Add 0.1
    nl of 0.01M hydrochloric acid to tube'b' and 0.2 ML
    of 0.01M hydrochloric acid to tube. Pass a 23 liter
    5 Analytical Procedures
    gaseous sample of octafluorocyclobutane through the
    I Acidity -TI
    edure is for the determin
    solution in tube b
    of acidity in octafluorocyclobutane using a classical the test with the other two tubes. The intensity of the
    chemical method of analysis, utilizing methyl red
    color produced in,should be between those solutions
    indicator
    ndc. The formation of a pink color indicates
    acidity. A yellow color will be produced by alkalinity
    5.1. I Detection 1imit- I ppm as HF
    5. 134.1 The colors of the test solutions befor
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