SEMI C3.18-94 STANDARD FOR DICHLOROSILANE (H2SiCl2) IN CYLINDERS.pdf

SEMI C3.18-94
STANDARD FOR DICHLOROSILANE ( H2SIC12)IN CYLINDERS,
97 QUALITY
1 Description
Metric units
US Uni
Dichlorosilane is a flammable. corrosive. colorless lig
lid which hydrolizes in the presence of moisture. It Specific gravity ofgas at 3.48
3.48
adily and rapidly to release hydrogen chl
21.1C(70 F)and I atm
ride. It is easily ignited in the presence of air
Density of liquid at 122 kg/m
7.621b/r
2 Specifications
25"C(77"F)
QUALITY: 97%(iquid)(See Notes 1, 2, 3, 4)
5 Analytical Procedures(See Note 5)
5.1 Other Chlorosilanes-this procedure is for the
Impurities
Maximum Acceptable 1envels'*
determination of other chlorosilanes(monochlorosi
All Other Chlorosilanes 3%(liquid phase)
lane, trichlorosilane and silicon tetrachloride) in
dichlorosilane using a gas ch
ph with a th
Silicon Tetrachlorid
mal conductivity detector
T'rich lorosilanc)
5.1.1 Detection Limit- 10 ppm(mole/mole
Aluminum
I ppb (vapor phasc dcrivcd)
5. 12 1ns/men/ Parameters
Arsenic
0.5 ppbw (vapor phase derived)
Boron
0.3 ppw (vapor phasc dcrivcd
1.2.1 Column: 3.05 m(10 ft )by 3.2 mm(1/8 in)
stainless steel tubing packed with 20% OV-101 on 80/
Carbon
10 ppmw(vapor phase derived)100 Chromosorb W-HP or equivalent
50 ppw (liquid phase
12. 2 Carrier Flow: 20 ml/min helium
Phosphorus
0.3 ppw (vapor phase derivcd 5.1.2.3 Sample Volume: 0.5 to 1.0 ml
The number of significant figures will be based on analytica/ 5. 1. 2.4 Temperatures
An analysis of significant figures has not been considered
accuracy and the precision of the providcd proccdurc
Detector
350°C
3 Electrical Specification
Column
60C ramped to 325C at 10C/min
Inict
300°C
Resistivity, i
greater than 50 ohm-cm (n-type)**e
Thc resistivity mcasurcmcnt tcchniquc is to be dctcrmincd 5.1.3 pealing Procedure
bctwccn supplier and uscr
5.1.3.1 Inject a known sample of monochlorosilane
* Monocrystalline silicon formed from this material, not the trichlorosilane and silicon tetrachloride in dichorosi
material itself
lane into the column using a gas sampling valve
Record the retention times and peak areas. The order
4 Physical Constants(for information only
of elution is monochlorosilane. dichlorosilane. trichlo
rosilane. sillicon tetrachloride
Metric nils
U.S Units
5.1.3.2 Inject the sample to be tested in the same
Molccular wcight
100.99
100.99
manner as in.1.3.1. Record the areas of the peaks
Boiling point al I atm
8.2"C
46.8F
which have the same retention times as those in
5.1.3.1
of gas at 25C 4.168 kg/m
2601b/ft
(77F)and I atm
5.1.3.3 Repeat5.1.3
SEMI C3.18-940SEMI1982,1996