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类型SEMI SUGGESTED GUIDELINES FOR PURE WATER FOR.pdf

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    SEMI SUGGESTED GUIDELINES FOR PURE WATER
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    sem
    SEMI SUGGESTED GUIDELINES FOR PURE WATER FOR
    SEMICONDUCTOR PROCESSING ( Withdrawn 0200)
    NOTE: This document was balloted and approved for withdrawal in 1999. The ballot recommends that all
    references to SEMT Suggested Guidelines for Pure Water for Semiconductor Processing will be edited to refer to
    ASTM D-5127, Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industry in the
    Process Chemicals volume and the entire SEMI Book of Standards (BOSS)
    NOTE: This information has been released courtesy of Balazs Analytical Laboratory(1994
    NOTICE: These suggested guidelines are published as
    non-standard technical information and is intended for
    informational purposes only. This is not a standard, and
    should not be confused with documents that have been
    balloted to the industry and have passed procedural
    review
    1 Background
    s a result of the efforts from SEMIS Pure Water Task
    Force information has been obtained with the
    cooperation of Balazs Analytical Laboratory for
    suggested guidelines for pure water used in
    semiconductor processing. These guidelines are based
    on the quality of final filter water found at 80 US
    companies involved in manufacturing integrated
    circuitry gathered and used by Balazs
    Laboratory which were presented
    the 1988
    Semiconductor Pure Water Conference
    Copyright by SEM(Semiconductor Equipment and Materials 1 SEMI SUGGESTED GUIDELINES O SEMI 1995, 2001
    International), 308] 7ankcr Road, San Josc, C 95134 Rcproduction of
    the contents in whole or in part is forbidden without express written
    consent ol SEMLL
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