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类型SEMI C3.26-0301 SPECIFICATION FOR TUNGSTEN HEXAFLUORIDE (.pdf

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    SEMI C3.26-0301 SPECIFICATION FOR TUNGSTEN HEXAFLUORIDE C3 26 0301
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    sem
    SEMI C3,26-0301
    SPECIFICATION FOR TUNGSTEN HEXAFLUORIDE (WF)IN
    CYLINDERS. 99. 8% QUALITY
    This specification was technically approved by the Global Gases Committee and is the direct responsibility of
    the North American Gases Committee. Current edition approved by the North American Regional Standards
    CommittcconNovcmbcr22,2000.Initiallyavailablcalwww.scmi.orgJanuary2001;tobcpublishedMarch
    2001. Originally published in 1984 prcviously published in 1994
    1 Description
    4 12 instrment Parameters
    1. 1 Tungsten hexafluoride is a col orless gas or 4.1.2.1 Columns: (See Figures 1, 2
    colorless liquid. It is shipped as a liquefied gas under
    Its own vapor pressure
    Column 1: Porapak S, 80/100 mesh, 1.5 m(5 ft)b
    6. 4 mm(1/4 in )OD, 5.1 mm(0.2 in)ID, ss
    2 Specifications
    or equivalent
    QUALITY: 99. 8%
    Column 2
    Molccular sicvc 5A 80/100 mesh 1.8 m
    (60by4.8mm(3/16in)OD,3.7mm
    (0.147 in) ID, ss or equivalent
    Level (ppm)(See NOTE I
    4.1.2.2 Column Flow: 30 ml/min helium
    Carbon Tctralluoridc( CFA)
    I Hydrogen Fluoride (F)
    1000
    4. 1.2.3 Sample Volume: 2 m
    Nitrogcn (N
    50
    4.1.2. 4 Temperatures
    Dctc
    709C
    Silicon Tctralluoridt
    40°C
    TOTAL LISTED IMPURITTES
    1130
    NOIE I: An analysis of signilicant ligures has nol been considered
    4.1.3 Calibration Standard -50 ppm (mol/mod
    The number of significant figures will be based on analytical nitrogen, 50 ppm(mo/mol)oxygen, balance helium
    accuracy and the precision of the provided procedure
    4.1.4 Operaling Procedures
    3 Physical Constants(for in formation only)
    4. 1.4. I Determine the times for valve switching and
    Metric Units US Units
    signal changes, and enter into the run table. An example
    of a run table follows
    Molccular wcight
    297.85
    297.85
    Boiling point al 1 alm
    17.19C
    62.8°F
    Iime Po
    inunction
    Density of gas at 22.8C 12.9 kg/m0.805 1b/ft
    (73F)and I atm
    0 min
    Purge sample
    gh loop. Backllush
    Porapak column. Connect MS column
    hhc TCD
    Density of liquid at boiling 3440 kg/m' 214.8 Ib/
    I min
    Injcct samplc onto Porapak column
    poinl
    A
    4 Analytical Procedures(See Notes 1, 2, 3, 4,
    MS column. Scqucntially clutc the
    oxygcn argon and nitrogcn Irom thc
    MS column to the TCD
    4.1 Nitrogen and Oxygen +Argon- This procedure
    4 min
    Backflush Porapak column to vent for
    is for the determination of nitrogen and oxygen + argon
    8 minutes
    in tungsten hexafluoride using a gas chromatograph
    with a thermal conductivity detector
    4.1.4.2 Set the valves in Position 1(Figure 1)
    4.1.1 Detectio7 Limits- 10 ppm (mol/mol )nitrogen, 4.1 4.3 Flow the calibration standard through the 10-
    and 10 ppm( mo/mol) oxygen +argon
    port valve. Analyze standard using the conditions
    described above. Record retention times and peak areas
    SEMI C3.26-0301 D SEMI1984,2001
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