SEMI C3.26-0301 SPECIFICATION FOR TUNGSTEN HEXAFLUORIDE (.pdf
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SEMI C3,26-0301
SPECIFICATION FOR TUNGSTEN HEXAFLUORIDE (WF)IN
CYLINDERS. 99. 8% QUALITY
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
CommittcconNovcmbcr22,2000.Initiallyavailablcalwww.scmi.orgJanuary2001;tobcpublishedMarch
2001. Originally published in 1984 prcviously published in 1994
1 Description
4 12 instrment Parameters
1. 1 Tungsten hexafluoride is a col orless gas or 4.1.2.1 Columns: (See Figures 1, 2
colorless liquid. It is shipped as a liquefied gas under
Its own vapor pressure
Column 1: Porapak S, 80/100 mesh, 1.5 m(5 ft)b
6. 4 mm(1/4 in )OD, 5.1 mm(0.2 in)ID, ss
2 Specifications
or equivalent
QUALITY: 99. 8%
Column 2
Molccular sicvc 5A 80/100 mesh 1.8 m
(60by4.8mm(3/16in)OD,3.7mm
(0.147 in) ID, ss or equivalent
Level (ppm)(See NOTE I
4.1.2.2 Column Flow: 30 ml/min helium
Carbon Tctralluoridc( CFA)
I Hydrogen Fluoride (F)
1000
4. 1.2.3 Sample Volume: 2 m
Nitrogcn (N
50
4.1.2. 4 Temperatures
Dctc
709C
Silicon Tctralluoridt
40°C
TOTAL LISTED IMPURITTES
1130
NOIE I: An analysis of signilicant ligures has nol been considered
4.1.3 Calibration Standard -50 ppm (mol/mod
The number of significant figures will be based on analytical nitrogen, 50 ppm(mo/mol)oxygen, balance helium
accuracy and the precision of the provided procedure
4.1.4 Operaling Procedures
3 Physical Constants(for in formation only)
4. 1.4. I Determine the times for valve switching and
Metric Units US Units
signal changes, and enter into the run table. An example
of a run table follows
Molccular wcight
297.85
297.85
Boiling point al 1 alm
17.19C
62.8°F
Iime Po
inunction
Density of gas at 22.8C 12.9 kg/m0.805 1b/ft
(73F)and I atm
0 min
Purge sample
gh loop. Backllush
Porapak column. Connect MS column
hhc TCD
Density of liquid at boiling 3440 kg/m' 214.8 Ib/
I min
Injcct samplc onto Porapak column
poinl
A
4 Analytical Procedures(See Notes 1, 2, 3, 4,
MS column. Scqucntially clutc the
oxygcn argon and nitrogcn Irom thc
MS column to the TCD
4.1 Nitrogen and Oxygen +Argon- This procedure
4 min
Backflush Porapak column to vent for
is for the determination of nitrogen and oxygen + argon
8 minutes
in tungsten hexafluoride using a gas chromatograph
with a thermal conductivity detector
4.1.4.2 Set the valves in Position 1(Figure 1)
4.1.1 Detectio7 Limits- 10 ppm (mol/mol )nitrogen, 4.1 4.3 Flow the calibration standard through the 10-
and 10 ppm( mo/mol) oxygen +argon
port valve. Analyze standard using the conditions
described above. Record retention times and peak areas
SEMI C3.26-0301 D SEMI1984,2001
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