SEMI C3.31-94 STANDARD FOR DICHLOROSILANE (H2SiCl2) IN CYLINDERS.pdf

SEMI C3.31-94
STANDARD FOR DICHLOROSILANE H2SIC2) IN CYLINDERS
99% QUALITY(PROVISIONAL)
Description
4. 12 instrument Parameters
Dichlorosilane is a flammable corrosive. colorless i
4.1.2.1 Column:3.05m(10ft)by3.2mm(1/8in
uid which hydrolizes in the presence of moisture. It stainless steel tubing packed with 20% OV-101 on 80,
oxidizes readily and rapidly to release hydrogen chlo-100 Chromosorb W-HP or equivalent
ride. It is easily ignited in the presence of air
4.12.2 Column Flow: 20 ml/min helium
2 Specifications
4.1.2.3 Sample Volume: 0.5 to 1.0 ml
QUALITY: 99%(Liquid)(See Notes 1, 2, 3, 4)
4. 1. 2.4 Temperatures
Impurities
Maximum Acceptable Levels
Detector
350"C
All othcr Chlorosilanes 1%(liquid phasc
Column
60C ramped to 325 C at
(Monochlorosilane not
10C/m in
to exceed 0.5%)
300"C
Aluminum(Al)
1.0 ppw(vapor phasc dcrivcd)
4.1.3 Operating Procedure
Arscnic (As
0.2 ppw(vapor phase dcrivcd)
4.1.3. 1 Inject a known sample of monochlorosilane
Boron(B)
0 I ppw(vapor phasc derivcd) trichlorosilane and silicon tetrachloride in dichloro
Carbon ( C)
I ppmw (vapor phase derived)
ane into the column using a gas sampling valve
Record retention times and peak areas. The order of
Tron (Fe
50 ppw(liquid phase
elution is monochlorosilane. dichlorosilane. trichlo-
0.3 ppw(vapor phas
lane. silicon tetrachloride
4.1.3.2 Inject dichlorosilane sample to be te
An analysis of significant ligures has not bccn considcrcd
Il be ba
Same manner as in4 13. 1 Record the areas of the
accuracy and the precision of the provided proccdurc
peaks which have the same retention times as those ir
4.1.3
3 Electrical Specification
4.1.3.3 Calculate the purity of dichlorosilane in the
sample, using the formula below. The result may no
Resistivi
Greater than 150 ohm-cm be less than the specification in Section 2 of this Stan
(n-type)
dard
The resistivity measurement is to be determined between 4.1.3.4 Calculate the percentage the monochloro
ton stated below. The
Monocrystallinc silicon formed from this material, not the
result may not be more than the specification in Sec
material itself
tion 2 of this Standard
4 Analytical Procedures( See Note 5
4.1.4 Calculations
4.1 Other Chlorosilanes-this procedure is for the 4.14.1 Determine the total area of the chlorosilane
determination of other chlorosilanes( monochlorosi-peaks(AT)by adding the areas of the four peaks
ane, trichlorosilane and silicon tetrachloride )in
dichlorosilane using a gas chromatograph with a ther
4.1.4.2 Divide the area of the dichlorsilane peak b
mal conductivity detect
AT. Multiply the result by 100% to obtain the purity o
ne dichlorosilane
4.1.1 Detection himi- 10 ppm(mole/mole
SEMI C3.31-94のSEMI1986,1996