SEMI C44-0301 SPECIFICATIONS AND GUIDELINES FOR SULFURIC ACID.pdf
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SEM C44-0301
SPECIFICATIONS AND GUIDELINES FOR SULFURIC ACID
Thesc spccifications and guidelines wcrc technically approved by the Global Proccss Chemicals Committcc
and arc the dircct rcsponsibility of thc North Amcrican Proccss Chcmicals Commillcc. Current edition
approved by the North American Regional Standards Committee on October 17, 1999. Initially available at
www.scmi.orgFcbruary2001;tobepublishedMarch2001.thisdocumcntreplacesSEMCl.16,C7.8
C8.8, and Cl1.5 in thcir cntircty. Originally published in 1978, 1990, 1992, and 1994 rcspcctivcly
prcviously published October 2000
1 Purpose
5 Terminology
ent is to standardi
requirements for sulfuric acid used in the
semiconductor industry and testing procedures to 6 Physical Property(for info rmation only)
support those standards. Test methods have been shown
to give statistically valid results. This document also
Density at 25C
1.83 g/ml
provides guidelines for grades of sulfuric acid for whic
a need has been identified. In the case of the guidelines, 7 Requirements
the test methods may not have been statisticall
validated vet
7.1Th
for sulfuric acid for Grades
and 2. VLSI Grade. and Tiers B and C are listed in
2 Scope
Table 1
The scope of this document is all grades of sulfuric 8 Grade 1 Procedures
acid used In the semiconductor industry
NOTE 2: Each laboratory is responsible for verifying the
2.2 The VLSI grade purity level is typically required validity of the method within its own operation
by semiconductor devices with geometries of 0.8-1.2
8.1 As: sa
:curately weigh I ML of sample in a
microns
small glass-stoppered conical flask. Cautiously add 30
3 This standard does not purport to address safety ML
water. cool. add 0.1 ML of methyl orange
issues, If any, associated with Its use. It is th
indicator solution, and titrate with standardized 1.0 N
responsibility of the users of this standard to establish sodium hydroxide to a red to yellow color change
appropriate safety and health practices and determine
mL× N of NAOH×4.904
the applicability of regulatory limitations prior to use
assay
Weight of sample(g
3 Limitations
8.2 Color-dilute 2.0 ML of platinum-cobalt stock
3.1 None
solution (APHA No. 500) to 100 ml with water
Compare this standard (APHA No. 10)with 100 ML o
4 Referenced Standard
sample in Nessler tubes. View vertically over a white
4. 1 SEM Standards
background. The sample must be no darker than the
standard
SEMI Ci-specifications for Reagents
8.3 Chloride-place 40 ml of water in each of two
4.2 ASTM Standards
eakers. To one, add carefully 27 ml(50 g)of sample
ASTM D5127-standard Guide for Ultra Pure Water
and to the other, 27 ml (50 g)of chloride-free sulfuric
Used in the Electronics and Semiconductor Industry
acid and 0.005 mg of chloride ion(Cl). Cool to room
add I ml of nitric acid and I
NOTE 1: As listed or revised, all documents cited shall be the silver nitrate reagent solution. Mix well, if necessary
latest publications of adoptcd standards
make the volume of each solution identical by adding
water. After 10 minutes, measure the turbidity of each
solution using a suitable nephelometer. The turbidity in
the sample shoul展开阅读全文

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