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类型SEMI C44-0301 SPECIFICATIONS AND GUIDELINES FOR SULFURIC ACID.pdf

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    SEMI C44-0301 SPECIFICATIONS AND GUIDELINES FOR SULFURIC ACID C44 0301
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    sem
    SEM C44-0301
    SPECIFICATIONS AND GUIDELINES FOR SULFURIC ACID
    Thesc spccifications and guidelines wcrc technically approved by the Global Proccss Chemicals Committcc
    and arc the dircct rcsponsibility of thc North Amcrican Proccss Chcmicals Commillcc. Current edition
    approved by the North American Regional Standards Committee on October 17, 1999. Initially available at
    www.scmi.orgFcbruary2001;tobepublishedMarch2001.thisdocumcntreplacesSEMCl.16,C7.8
    C8.8, and Cl1.5 in thcir cntircty. Originally published in 1978, 1990, 1992, and 1994 rcspcctivcly
    prcviously published October 2000
    1 Purpose
    5 Terminology
    ent is to standardi
    requirements for sulfuric acid used in the
    semiconductor industry and testing procedures to 6 Physical Property(for info rmation only)
    support those standards. Test methods have been shown
    to give statistically valid results. This document also
    Density at 25C
    1.83 g/ml
    provides guidelines for grades of sulfuric acid for whic
    a need has been identified. In the case of the guidelines, 7 Requirements
    the test methods may not have been statisticall
    validated vet
    7.1Th
    for sulfuric acid for Grades
    and 2. VLSI Grade. and Tiers B and C are listed in
    2 Scope
    Table 1
    The scope of this document is all grades of sulfuric 8 Grade 1 Procedures
    acid used In the semiconductor industry
    NOTE 2: Each laboratory is responsible for verifying the
    2.2 The VLSI grade purity level is typically required validity of the method within its own operation
    by semiconductor devices with geometries of 0.8-1.2
    8.1 As: sa
    :curately weigh I ML of sample in a
    microns
    small glass-stoppered conical flask. Cautiously add 30
    3 This standard does not purport to address safety ML
    water. cool. add 0.1 ML of methyl orange
    issues, If any, associated with Its use. It is th
    indicator solution, and titrate with standardized 1.0 N
    responsibility of the users of this standard to establish sodium hydroxide to a red to yellow color change
    appropriate safety and health practices and determine
    mL× N of NAOH×4.904
    the applicability of regulatory limitations prior to use
    assay
    Weight of sample(g
    3 Limitations
    8.2 Color-dilute 2.0 ML of platinum-cobalt stock
    3.1 None
    solution (APHA No. 500) to 100 ml with water
    Compare this standard (APHA No. 10)with 100 ML o
    4 Referenced Standard
    sample in Nessler tubes. View vertically over a white
    4. 1 SEM Standards
    background. The sample must be no darker than the
    standard
    SEMI Ci-specifications for Reagents
    8.3 Chloride-place 40 ml of water in each of two
    4.2 ASTM Standards
    eakers. To one, add carefully 27 ml(50 g)of sample
    ASTM D5127-standard Guide for Ultra Pure Water
    and to the other, 27 ml (50 g)of chloride-free sulfuric
    Used in the Electronics and Semiconductor Industry
    acid and 0.005 mg of chloride ion(Cl). Cool to room
    add I ml of nitric acid and I
    NOTE 1: As listed or revised, all documents cited shall be the silver nitrate reagent solution. Mix well, if necessary
    latest publications of adoptcd standards
    make the volume of each solution identical by adding
    water. After 10 minutes, measure the turbidity of each
    solution using a suitable nephelometer. The turbidity in
    the sample shoul
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