SEMI C3.28-0200 STANDARD FOR NITROGEN (N2), VLSI GRADE IN CYLINDERS.pdf

SEMI C3,28-0200
STANDARD FOR NITROGEN(N2), VLSI GRADE IN CYLINDERS,
99.9996% QUALITY
ed by the Global Gases Ce
North American Gases Committee. Current edition approved by the North American Regional Standar
Commitcc on Octobcr 7 1999. Initially availablc on SEMI Onlin January 2000, to be published Fcbruary
2000. Originally published in 1985; prcviously ir
and hydrogen in nitrogen using a gas chromatograph
1 Description
with a reduction gas detector
1. I Nitrogen is an odorless, tastele ss, diatomic gas
4. 1.1 Detection Limits
pb (mole/mole) carbon
comprising approximately 78% of the earth s
monoxide, 20 ppb( mole/mole)hydrogen
atmosphe
lere, colorless liquid; chemically unreactive
Noncombustible; an asphyxiant gas; cryogenic. Derived 4.1.2 Instrumen Paramelers-(See NOTE 1)
from liquid air by fractional distillation
4.1.2.1 Column-molecular Sieve 5A.0.9 m (3 ft)
by 3.2 mm ID (1/4 in )OD, stainless steel; or
2 Specifications
equivalent.
QUALITY: 99.9996%
4. 1.2.2 Carrier Elow-40 ml/min air or nitrogen
Impurities
Maximum Acceptable
4.1.2.3 Sample Volume-2.0 ML
Level(ppm (See NOTE I
4.1.2.4T
arbon Dioxide(CO>)
0.5
I Carbon Monoxide( CO
Ctcc
280°C
250C
Oxygen(02)
0.5
4.13 Calibration Standard
-5 ppm (mole/mole
Particlcs
Scc NOTE 2
de, 1-5 ppm (mole/mole hydrogen
Total Hydrocarbons expressed as
0.5
balance nitroger
Mcthanc(THC)
4.1.4 Operating Procedure
Water(H,O)(v/v)
0.5
TOTAL SPECIFTED
4.1.4.1 Inject the calibration standard into the column
IMPURITIES
using a gas sampling valve Record the retention times
NOLE 1: An analysis of significant figures has not bccn considere
and peak areas. Order of elution is hydrogen, ther
Ihe number of significant figures will be based on analytical carbon monoxide. Run standard analysis in triplicate for
Accuracy and the precision of the provided proccdurc
stability determination relative to purging of calibration
NOTE 2 To be determined between supplier and user.
system components
3 Physical Constants(for in formation only
4.1.4.2 Inject the sample to be tested in same manner
as the calibration standard, Record the retention times
Metric units
US Units
and peak areas
Molecular weight
28.013
28.013
4.1.4.3 Repeat Section 4.1.4.1
Boiling point at I atm
195.8°C
320.4°F
4.1.4. 4 Compare the average peak are as of the
Density of gas at 21.1oc.1605 kg/m0.07245 Ib/
calibration standard to that of the nitrogen sample being
(70°F) and I atm
tested Calculate the concentrations of carbon monoxide
Specific gravity of gas at
0.967
0.967
and hydrogen, using the formula below. The results
1.IOC and I atm(air
may not exceed the specifications in Section 2 of this
Density of liquid at boiling 808.8 kg/r
50.491bf3
Standard
point
Arca Concentration Concentration
4 Analytical Procedures(See NOTES 3 and 4)
tandard Pcak Arca "of Standard of Samplc
4.1 Carbon Monoxide and Hydrogen
Thi
4.2 Carbon Dioxide-this procedi
for the
procedure is for the determination of carbon monoxide
determination of carbon dioxide in nitrogen using a
continuous flow, non