SEMI C3.24-0301 SPECIFICATION FOR SULFUR HEXAFLUORIDE (SF6.pdf

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SEMI C3.24-0301
SPECIFICATION FOR SULFUR HEXAFLUORIDE(SF)IN CYLINDERS,
99.97% QUALITY
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
CommittcconNovcmbcr22,2000.Initiallyavailablcalwww.scmi.orgJanuary2001;tobcpublishedMarch
2001. Originally published in 1984 prcviously published in 1995
Description
4.1.2.2 Carrier Flow: 30 ml/min helium
1. I Sulfur hexafluoride is colorless and odorless. It is 4.1.2.3 Sample Volume: 1 ml
noncombustible and has a low toxicity. It is shipped as
4.1.2.4 Temperatures
a liquefied gas under lts Own vapor pressure
2 Specifications
Column
70°C
QUALITY: 99.97%
Maximum Acceplable Level
4.13 Calibration Standards
90-100
Impurities
(ppm)(See NO1E 1.
(mol/mol)carbon tetrafluoride, 90-110 ppm (mol/mol)
Air(O2/N2 blend balance helium
Carbon Tetrafluoride(CF4)
100
4.1.4 Operaling Procedure
Hydrogcn Fluoride( HF)
4.1.4.1 Inject the calibration standard. Analyze the
Watcr(H-o
standard using the conditions described above. Record
TOTAL LISTED
209
the retention times and peak areas
IMPURITIES
4.1.4.2 Iniect the sample to be tested in the same
NOT: 1: An analysis of signilicant Figures has not becn considcrcd
manner as the calibration standard Record the retention
The number of significant figures will be based on analytical
accuracy and the precision of the provided procedure
times and peak areas
3 Physical Constants(for in formation only)
4.1.4.3 Repeat4.1.4.1
4.14.4 Calculate the concentrations of air and carbon
Metric lnit
nple, using the formula belo
olccular wcight
46.054
he result may not exceed the specification in Section 2
Boiling point at I atm
63.7C
-82.79F
of this Standard
Density of gas at 20%C 6.162 kg/m0.385 1b/ft
( 68F)and I atm
Sample Peak
Conccntration Conccntration
Spccific gravity of
5.114
5.114
Standard Peak
of Standard
of Sample
211C(70F)and 1 atm
(air
4.2 Hydrogen Flaoridle-this procedure is for the
Density of liquid at-5011910 kg/m 119.2 1b/,determination of hydrogen fluoride by quantitative
(Nahco3)
subsequent analysis by ion chromatography
4 Analytical Procedures (Notes 1, 2, and 3)
4.2.1 election /imit-0I ppm for the method
4. 1 Air and Carbon tetrafluoride- This pr
for the determination of air and carbon tetrafluoride
Equipment Required
using a gas chromatograph with a thermal conductivity
500 ML Greenburgh impinger
tector
50 ml Class A pipet
4.1.1 Delection /imil- I ppm(mo l/mol
Type 316 stainless steel delivery system
4 12 nstrument Parameters
5"Fluorocarbon tubing, 1/4 in OD by 0.03 in wall
4.1.2.1 Column: 2. 4 m(8 ft)by 6.4 mm(1/4 in) OD
5. 1 mm (0.201 in)ID stainless steel tubing packed with
Reagent Grade sodium bicarbonate
Porapak Q(80/100 mesh )or equivalent
Deionized water
SEMI C3.24-0301@SEMI1984.2001