SEMI E106-0301 PROVISIONAL OVERVIEW GUIDE TO SEMI STANDARDS.pdf

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SEMI E106-0301
PROVSIONAL OVERVEW GUDE TO SEM STANDARDS FOR
PHYSICAL INTERFACES AND CARRIERS FOR 300 mm WAFERS
This guide was technically approved by the Global Physical Interfaces &Carriers Committee and is the direct
responsibility o the North American Physical Interlaces Carriers Committee. Current edition approved by
thc North Amcrican Rcgional Standards Commiltcc on Octobcr 19, 2000
lly availablc al
www.scmi.orgNovcmbcr2000;tobcpublishedMarch2001.OriginallypublishedOctobcr2000.This
document replaces SEMI PR6-0200 in its entire
1 Purpose
2. 2 This document is provisional because the SEMI
standards for 300 mm physical interfaces and carriers
1. 1 This document is intended to help users and are not complete. Once all of the relevant standards
suppliers of 300 mm carriers and production equipment have passed the balloting process, this document should
to understand the complex interdependencies among the be modified and upgraded from provisional status
SEMI standards for 300 mm physical interfaces and Standards under development include documents that
carriers and to determine which standards apply to specify
which products. As shown in Figure 1, these standards
are highly inter-related, have many complex
carriers for thinned wafers
dependencies, and inherit a numbering system (from load ports for frame cassettes at backend processes
legacy 200 mm standards )that is non-intuitive
manual handoff operation interfaces at load ports
2 Scope
2. 3 This standard does not purport to address safety
2.1 This document describes how the SEMI standards issues, if any, associated with its use. It is the
for 300 mm physical interfaces and carriers work responsibility of the users of this standard to establish
together. This document also clarifies the requirements appropriate safety health practices and determine the
(direct and indirect )or
iers of each product, and applicability or regulatory limitations prior to use
suggests how users see these standards and options
M1.15,M8,M28
G74
G77
Wafer
Tape Frame
Frame
Cassette
E57
Kinematic
E1.9
E22.1
Coupling
Cassette
Cluster-tool
End Effector
M31
E8
FOSB
AMHS
Interoperability
Cluster-tool
Module
Interface
E84
E103
E15.
SWF
E47.1
Carrier
Load
Handoff
E26
FOUP
E6
Port
Parallel /O
Radial
FMS
Cluster-tool
Footprint
E72
E83
E64
Equipment
E25
PGV
Footprint, Cluster-tool
E63
E92
Docking Docking
Height
Module
BOLTS-M Bolts-light Flange Interface and Weight
Access
Complex Relationships and Dependencies Among 300 mm Standards
SEMI E'106-0301@SEMI2000,2001