SEMI E30-1000 GENERIC MODEL FOR COMMUNICATIONS AND CONTROL.pdf

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SEMI E30-1000
GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF
MANUFACTURING EQUIPMENT(GEM)
This standard was technically approved by the Global Information &Control Committee and is the direct
responsibility of the North Amcrican Information & Control Committce. Currcnt edition approved by thc
North American Regional Standards Committee on July 14 and August 28, 2000. Initially available at
wwwscmior August 2000; to bc published Octobcr 2000. Originally published in 1992; prcviously
published June 2000
able 4.2, Limit State Transition Table
CONTENTS
4.3 Alarm Management
1 Introduction
ligure 4.3, State Diagram for Alarm ALIDN
1. 1 Revision History
Table4.3. 1. Aarm State Transition Table
1. 2 Scope
Table 4.3.2
1.3 Intent
4.4 Remote Control
Iigure 1. L/, GEM Scope
4.5 Equipment Constants
1.4 Overview
4.6 Process Program Management
igure 1. 2, GEM Components
4.7 Material Movement
1.5 Applicable Documents
4.8 Equipment Terminal Services
2 Definitions
4.9 Error Mess
3 State Models
4.10 Clock
3. 1 State Model Methodolog
4.11 Spooling
3.2 Communications State Mode
ligure 4. 11, Spooling State Diagram
Higur'e 3.0, Example Equipment Component Overview
lable 4. 11, Spooling State Transition
Tigure 3.2.1, Communications State Diagram
4.12 Control
Table 3. 2. Communications State Transition Table
5 Data Items
3.3 Control State Mode
5. I Data Item Restriction
ligure 3. 3, Control State Model
5.2 Variable Item List
lab/ 3.3 CONTROL State Transition Table
6 Collection Events
3.4 Equipment Processing States
able 6.1 GEM Defined Collection Events
Figure 3.4, Processing State Diagram
7 SECS-I Message Subset
Table 3.4, Processing State Transition Table
STREAM 1: Equipment Status
4 Equipment Capabilities and Scenarios
STREAM 2: Equipment Control and Diagnostics
4. 1 Establish Communications
STREAM 5: Exception (Alarm )Reporting
4.2 Data Collection
STREAM 6: Data Collection
Figure 4. 2. 1, Limit Combination Illustration: Contro
Application
STREAM 7: Process Program Load
ligure 4.2.2, Elements of One Limit
STREAM 9: System Errors
Figure 4.2.3, Limit State Mode
STREAM 10: Terminal Services
STREAM 14: Obiect Services
SEMI E30-1000@SEMI1992,2000