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类型SEMI E10-0301 SPECIFICATION FOR DEFINITION AND MEASUREMENT.pdf

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    SEMI E10-0301 SPECIFICATION FOR DEFINITION AND MEASUREMENT E10 0301
    资源描述:
    sem
    SEMI E10-0301
    SPECIFICATON FOR DEFINITION AND MEASUREMENT OF
    EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY
    (RAM)
    This standard was technically approved by the Global Metrics Committee and is the direcl responsibility on
    the North American Metrics Committee. Current edition approved by the North American Regional
    StandardsCommittcconOctobcrI8andNovcmbcr22,2000.Initiallyavailablealwww.scmi.orgDcccmbcr
    2000; to be published March 2001. Originally published in 1986; previously published June 2000
    1 Purpose
    3 Referenced Standards
    1.1 This document establishes a co mmon basis for 3 1 SEMT Standards
    communication between users and suppliers o
    SEMI E58- Automated Reliability, Availability, and
    semiconductor manufacturing equipment by providing Maintainability Standard (ARAMS
    standards for measuring RAM performance of tha
    equipment in a manufacturing environment
    NOTE 1: As listed or revised. all documents cited shall be th
    latest publications of adopted standards
    2 Scope
    2.1 The document defines six basic equipment states
    4 Terminology
    into which all equipment conditions and periods of time 4. I availabiliy -the probability that the equipment
    must fall. The equipment states are determined by will be in a condition to perform its intended function
    functional issues, independent of who performs the when required
    unction. The measurement of equipment reliability in 4.2 chaster tool a manufacturing system made up of
    this specification concentrates on the relationship of integrated processing modules mechanically linked
    ent usage, rather than th
    relationship of failures to total elapsed time
    together (the modules may or may not come from the
    same supplier
    2. 2 Section 5(Equipment States)defines how 4.2.1 single path custer tool-a cluster tool with
    equipment time is categorized. Section 6(RAM
    Measurement )defines formulas for measurement of only one process flow path (as used)
    equlpment
    Section
    (Uncertainty 4.2. 2 multi-path cluster oo1 -a cluster tool with
    Measurement )gives additional methods for evaluating more than one independent process flow path (e. g
    the statistical significance of calculated performance multiple load ports/load-locks, multiple process
    metrics
    chambers of the same type)and used as such
    2.3 Effective application of this specification requires 4.3 c le one complete operational sequence
    that equipment performance(RAM )be tracked with (including unit oad and unload) of processing,
    regard to time and/or equipment cycles. Automated manufacturing, or testing steps for an equipment system
    tracking of equipment states is not within the scope of or subsystem. In single unit processing systems, the
    this specification, but is covered by SEMI E58. Clear number of cycles equals the number of units processed
    and effective communication among users and suppliers In batch systems, the number of cycles equals the
    promotes continuous improvement in equipment number of batches processed
    performance
    4.4 downtime(D1)-the time when the equipment is
    2. 4 The RAM indices in this specification may be not in a condition, or is not available, to perform its
    applied directly to non-cluster tools at the whole intended function. It does not include any portion of
    equipment and sub-syste
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