SEMI G67-0996 TEST METHOD FOR THE MEASUREMENT OF.pdf

SEMI G67-0996
TEST METHOD FOR THE MEASUREMENT OF PARTICLE
GENERATION FROM SHEET MATERALS
1 Purpose
7 Equipment
This test method describes a procedure to measure par-71 Paricle Counter and Recorder
ticles on sheet materials
72 Clean Bench with Aul Gloves and a st Particle
Measuremen/ Port- See Figure 1
2 Scope
The method described may be used for the measure
7. 2.1 Air flow speed in the clean bench should be 0.6
ment of particles on items such
m/sec
Leadframe Interleave
Cleanroom P
Packing Material
be used by th
turer for quality control or by a customer at incoming
Gioves
Inspection
3 Referenced Documents
lfigure 1
None
Clean Bench Configuration
4 Terminology
8 Sampling
Sampling plans shall be agreed between user and sup-
5 Summary of Method
The method is based on measuring a background parti-
9 Test Specimen
cle count in a clean enclosure and then measuring the Specimen size shall be agreed between user and su
increased particle count when items under test are sub-plier. It is recommended that a 152.4 mm x 203.2 mm
mitted to handling operations likely to generate parti-(68 inches )test piece be used
cles
10 Equipment Set-up
6 nterference
10.1 The particle counter shall be set up with the
6.1 Care must be taken to avoid contaminating the probe in the clean bench. Calibrate the counter in
clean bench when sheet materials are placed inside. All accordance with the equipment manufacturers instruc-
external packaging material shall be removed and the
internal packaging shall be cleaned by appropriate 10.2 Allow the clean bench to come to equilibrium
means prior to placing inside the bench
and perform a background particle count
6.2 A method of cutting the specimens to size, if per-
NOTE 1: Between each test. allow the clean bench to
formed must not add to or detract from. the contami
nation levels on the sheet materials
return to a stable background particle count before pro-
ceeding with the next test
6.3 Care must be taken to avoid contaminating the
specimens from the human body and clothes when the
NOTE 2: After several thousand particles have been
measured. the clean bench must be cleaned before
sheet materials are prepared for the test method
making the next measurement
SEM G67-0996 G SEM 1996
11 Test Procedure
13 Report
11. 1 Place the items to be tested in the clean bench The test report shall include the following items
and allow the clean bench to return to a stable back
Material Designation under Test
ground level for particle count
Manufacturer
11. 2 Crumpling fest
11. 2. 1 Crumple a test specimen in gloved hands at the
Shipping Lot Number
rate of one(1)crumple every fifteen(15 )seconds and
est Date
record the maximum particle count
Test Conditions -temperature, humidity in the
1 1.2.2 Record the maximum particle count and the
clean bench
initial background count
Particle Counter Sensitivit
1 3 Friction est
Test lue
11.3.1 Place two sheets of the material to be tested Results for Each Test Type in particles/m
face to face and rub together three (3)times in ten (10
seconds
NOTE 3: If the test is performed by the manufacturer
some of