SEMI PR3.6-0600 PROPOSED SPECIFICATION FOR SURFACE MOUNT.pdf

SEMI PR3.6-0600
ROPOSED SPECIFICATON FOR SURFACE MOUNT INTERFACE OF
GAS DISTRIBUTION COMPONENTS-H1G-SEAL DESIGN
This proposed specification was technically approved by the Global Facilities Committee and is the direct
responsibility of the North American Facilities Committee. Current edition approved by the North American
Rcgional Standards Committcc on April 10, 2000. Initially avail ablc on SEMI Onlinc May 2000; to bc
published Junc 2000
1 Purpose
7.2 Dimensional Reguiremenis-two port valves
shall meet the requirements outlined in Figure 1. Three
1. I This standard, in conjunction with the main port valves shall meet the requirements outlined in
document, establishes the properties and physical Figure 2. All components other than valves and mass
dimensions that define a complete surface mount flow controllers/meters shall meet the requirements
interface on the component for the Hig-seal design
outlined in Figure 3. All mass flow controllers/meters
shall meet the requirements outlined in Figure 4. The
2 Scope
sealing surfaces of all components shall meet the
2. 1 The scope is identical to the main document except Requirements outlined in Figure 5. All geometric
that it is limited to components which will employ the
dimensioning and tolerancing complies with ASME
HIG-SEAL design for the sealing interface. This design
Y14.5 and/or the applicable ISO standard
can be used with the HIG-SEAL or any compatible NOTE 1: All dimensions arc in millimeters unless otherwise
sealing methodologies
notcd
ndard do
NOTE 2 Thc diamclcr and I
of thc Icak check ports
:d with its
ed on the interface side of the
IS
the dr
r side o
ibility of the users of this standard
of the leak check port shall be
located on the upi
nponcnt body, howev
appropriate safety and health practices and determine
the diamctcr and location can vary with the top por / t
the applicability of regulatory limitations prior to use
component
3 Limitations
7.3 Sealing Sarface Hardness- The sealing surface
(the bottom of the counterbore )shall have a minimum
3. 1 The limitations are detailed in the main document
hardness of 300 Vickers. Testing shall be done per ISO
4 Referenced Standard
NOTE 3: This test will damage the sealing surface and
4. 1 The reference documents are detailed in the main should be considered destructive in nature
document
7. 4 Sealing Surface Roughness- The sealing surfac
5 Terminology
the bottom of the counterbore)shall have a surface
roughness of 0.2 micro meters Ra max. Testing shall
5. 1 The terminology is detailed in the main document
be done per ISO 428
6 Ordering Information
NOTE 4: This test may damage the sealing surface and may
be destructive in nature
6.1 The ordering information is detaile
d In the main
document
7.5 Sealing Surface Scratches
The sealing st
shall not have any radial scratches which are visible to
7 Requirements
non-magnltied normal vision
Components must meet all the
requirements ofthe main document
SEM PR3.6-0600 O SEM 2000