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类型SEMI E102-0600 PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK.pdf

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    SEMI E102-0600 PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK E102 0600
    资源描述:
    SEMI E.102-0600
    PROVSIONAL SPECFCATON FOR CM FRAMEWORK MATERAL
    TRANSPORT AND STORAGE COMPONENT
    nis provisional specification was technically
    ed by the Global Informati
    and is the direct responsibility o the Japanese Inormation and Control Committee. Current edition approved
    by the Japancsc Rcgional Standards Committcc on March 14, 2000 and by the North Amcrican Rcgional
    Standards Committcc on March 2, 2000. Initially availablc on SEMI Onlinc March 2000; to bc published
    June 2000
    1 Purpose
    Transport Machines and Storage Machines presented in
    this specification
    1.1 Wafer fabrication factories will require the
    baseline capabilities of stocker stora
    d interb
    d
    transport. In addition to these baseline capabilities
    Storage Component include interfaces that
    intrabay transport will be added as a result of
    ergonomic and safety requirements brought about b
    Support scheduling of material transport and
    the increased size and weight of 300 mm wafer carriers
    processing by predicting time for material delivery
    to specific locations. NOTE: The interfaces for
    These stocker, interbay transport, and intrabay transport
    delivery time prediction are deferred as one of the
    systems will be required to be fully integrated with each
    deficiencies noted in this provisional specification
    other and the factory Manufacturing Execution System
    (MES)in order to realize the full vision of cost Execute and monitor transport jobs to move
    effective automated material transport to and from
    material to specific locations
    production equipment
    Validate that the job can be done: the material
    1.2 A baseline requirement of Aut o mated Material
    is available, the destination is reachable and
    Handling System (AMHS) equipment is efficient
    has available storage or loadport capacity, and
    integration with the factory MES. Therefore, the
    movement
    purpose of this specification is to enable cost effective
    resources (cars, storage space, etc. ) to
    integration of interoperable AMHS systems, as
    implement the job
    illustrated in Figure I. Manufacturers require a SEMI
    standard which specifies the visible behavior of the
    Request operations from AMHS equipment
    AMHS Integration system and its interface to the
    controllers to enact internal material move-
    factory MES. The purpose of this standard is to specit
    ment and storage actions. Implementations of
    these interfaces and the interactions between MES and
    the Material Transport and Storage Compo
    AMHS systems as a part of the CIM Framework. While
    nent will use lower level standards such
    the term AMHS is commonly used to refer to a wide
    BSEM and Stockersem for communication
    range of equipment and systems that support automated
    with equipment that performs the physical
    material handling, the CTM Framework specifies a
    movement and storage actions
    software component called Material Transport and
    Collect and record data on transport job
    Storage Component(MTSC)"which represents the
    execution and history
    standard interface of the MES to the complete suite of
    AMHS capabilities
    Capture, record, interpret, and respond to
    equipment events and fault detection
    2 Scope
    Generate Mes-level job status events and
    2.1 Th
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