SEMI C27-0301 SPECIFICATIONS AND GUIDELINES FOR HYDROCHLORIC.pdf

sem
SEM C27-0301
SPECIFICATIONS AND GUIDELINES FOR HYDROCHLORIC ACID
Thcsc specifications and guidelines wcrc technically approved by whc Global Procss Chemicals Committcc
and arc the dircct responsibility of the North Amcrican Process Chemicals Commillcc. Current edition
pproved by the North American Regional Standards Committee by letter ballot dated October 17, 1999
Initiallyavailablcalwww.scmi.orgFcbruary2001;tobcpublishedMarch2001Thisdocumcntreplaces
SEM Cl. 7, C7. 2, C8.2, C11. 6, and C12. 2 in their cntircty. Originally published in 1978, 1990, 1992, 1996
and 1995 respectively; previously published Junc 2000
1 Purpose
5 Terminology
1. I The purpose of this document is to standardize
5.1 None
requirements for hydrochloric acid used in th
semiconductor indust
and testig
support those standards. Test methods have been shown
6 Physical Property(for info rmation only)
to give statistically valid results. This document also
1.19 g/ml I
provide
guidelines for grades of hydrochloric acid for
which a need has been identified. In the case of the 7 Requirements
guidelines, the test methods may not have been
statistically validated yet
7. I The requirements for hydrochl oric acid for Grades
1 and 2. VLSI Grade. and Tiers B and C are listed in
2 Scope
1 The scope of this document is all
8 Grade 1 Procedures
hydrochloric acid used in the semiconductor industry
NOTE 2: Each laboratory is responsible for verifying the
2.2 The VLSI grade purity level is typically required validity of the method within its own operation
by semiconductor devices with geometries of 0.8-1.2
8.1 Assay -Accurately weigh a glass-stoppered
microns
conical flask containing about 30 ml of water. Deliver
2.3 These specifications and guide lines do not purport from a pipet about 3 ML of sample near the water
to address safety issues, if any, associated with their surface, stopper immediately, and reweigh. Dilute to
It is the responsibility of the users of these about 50 ml with
add methyl orange ir
specifications and guidelines to establish appropriate solution, and titrate with standardized I N sodium
safety and health practices and determine the hydroxide to a red-to-yellow color change
applicability of regulatory limitations prior to use
IL x N of Naoh×3.646
3 Limitations
Wcight of samplc()
3.1 None
8.2 Co1or-dilute 2.0 ML of platinum-cobalt stock
solution (APHA No. 500)to 100 ml with water
4 Referenced Standards
Compare this standard (APHA No 10)with 100 ml o
sample in Nessler tubes. View vertically over a white
4 1 SEM Standards
background. The sample must be no darker than the
SEMI Cl-Specifications for Reagents
standard
4.2 AS/M Standards
8.3 Extractable Organic Substances-cool 110 ML
of sample in an ice bath. Add 5 ML of 2, 2,4-
ASTM D5127 -Standard Guide for Ultra Pure Water trimethylpentane and 100 ml of water to each of two
Used in the Electronics and Semiconductor Industry
250 ml separatory funnels. To a third funnel add 100
NOTE 1: As listed or revised. all documcnts citcd shall be the ml of water and 5 ml of the standard (see below).To
latest publications of adoptcd standards
the first funnel add 100 ml of the cooled sample, and
100 ml