SEMI E53-1296 EVENT REPORTING.pdf.pdf

SEMI E53-1296 SEMI 19961 SEMI E53-1296 N/A SEMI 1996 EVENT REPORTING 1 Purpose Access to process data in equipment is crucial for effective process monitoring and control in a semicon- ductor manufacturing facility. This standard addresses the communication needs of semiconductor equipment and other factory objects, such as cell controllers or recipe servers, with respect to the timely collection and reporting of such data. The purpose of this standard is to provide a general purpose set of event reporting services that may be offered by equipment suppliers. This document may be referenced, in whole or in part, by other standards addressing higher level application domains. The communications services defi ned here will enable standards based inter-operability of independent sys- tems. They shall allow application software to be developed which can assume the existence of these services and allow software products to be developed which offer them. 2 Scope This standard is applicable to any stand-alone equip- ment, cluster module, cluster tool, or cell of automa- tion in a factory. As such it addresses event reporting at all levels in the factory and equipment control hierar - chy. This standard requires signifi cant communication and computational resources and is therefore not applicable at or below the level of I/O distribution (e.g., sensor bus) within the equipment. This standard covers the reporting of data periodically and/or in response to events. Reports may also be requested on demand. This standard presents a solution from the concepts and behavior down to the messaging services. It does not defi ne the messaging protocol. A messaging service includes the identifi cation that a message shall be exchanged and defi nition of the data which is contained in that message. It does not include information on the structure of the message, how the data is represented within the message, or how the message is exchanged. This additional information is contained with the message protocol. The defi ned ser- vices may be applied to multiple protocols. Informa- tion on the mapping of these services to special protocols (e.g., SECS II) are added as adjunct stan- dards. The services assume a communications environment in which a reliable connection has been established between the user and the provider of the services. Establishing, maintaining, and releasing a connection is beyond the scope of this standard. 3 Referenced Documents 3.1 SEMI Standards SEMI E5 SEMI Equipment Communications Stan- dard 2 Message Content (SECS II) SEMI E30 Generic Model for Communications and Control of SEMI Equipment (GEM) SEMI E38 Cluster Tool Module Communications (CTMC) SEMI E39 Object Services Standard: Concepts, Behavior, and Services SEMI E40 Standard for Processing Management 4 Terminology 4.1 The following defi nitions are arranged in alpha- betical order. Some terms are defi ned using terms defi ned elsewhere within this section. Other terms may be defi ned within SEMIs Compilation of Terms. 4.1.1 attribute A data item associated with an object. An attribute may be referenced by zero or more data reports. 4.1.2 behavior The manner in which something functions; how an object acts and reacts, in terms of its state changes and message passing. 4.1.3 collection event An event that may be used to initiate the collection and reporting of data. A collec- tion event may trigger an event report. A collection event may also start or stop one or more trace reports. 2SEMI E53-1296 SEMI 1996 4.1.4 data report A data report is a list of attribute names for a single object. Data reports may be pre- defined by a factory object or defined dynamically by the service user. 4.1.5 default object The object assumed when no object specifier is supplied. 4.1.6 event Represents the occurrence of a change in the condition of a system (e.g., lot complete, tem- perature over range). 4.1.7 event report A class of objects that has infor- mation related to an event and can be linked to user defined data reports and can send messages containing this information to a service user. 4.1.8 factory object Any identifiable object within the factory information and control architecture. Examples include equipment, a cluster process mod- ule, a cell controller, a recipe namespace server. 4.1.9 object Defined in the Object Services (SEMI E39). 4.1.10 object specifi er Defined in the Object Ser- vices (SEMI E39). 4.1.11 services A set of closely related messages. 4.1.12 service provider A service provider is an application responsible for providing services to ser- vice users. NOTE: There may be one or more service users con- currently accessing a single service provider. It is the responsibility of the service provider to provide its services transparently to each service user. 4.1.13 service user A service user is any applica- tion that uses the services. 4.1.14 trace report A class of objects which pro- vides to a service user a means for collecting periodic readi