书签 分享 收藏 举报 版权申诉 / 24

类型SEMI E79-0200 STANDARD FOR DEFINITION AND MEASUREMENT OF.pdf

  • 上传人:2198264946
  • 文档编号:32552125
  • 上传时间:2017-06-17
  • 格式:PDF
  • 页数:24
  • 大小:323KB
  • 配套讲稿:

    如PPT文件的首页显示word图标,表示该PPT已包含配套word讲稿。双击word图标可打开word文档。

    特殊限制:

    部分文档作品中含有的国旗、国徽等图片,仅作为作品整体效果示例展示,禁止商用。设计者仅对作品中独创性部分享有著作权。

    关 键  词:
    SEMI E79-0200 STANDARD FOR DEFINITION AND MEASUREMENT OF E79 0200
    资源描述:
    SEMI E79-0200
    STANDARD FOR DEFINITION AND MEASUREMENT OF EQUIPMENT
    PRODUCTIVITY
    This standard was technically approved by the Global Metrics Committee and is the direct responsibility of
    the North American Metrics Committee. Current edition approved by the North American Regional
    Standards Committcc on Dcccmbcr 15, 1999. Initially availablc on SEM Onlinc Fcbruary 2000, to bc
    published Fcbruary 2000. Originally published Fcbruary 1999
    NOTE This document was rewritten in its entirety in production units, and(2 )the efficiency metric is
    2000
    applicable to flexible-sequence cluster tools, while the
    effectiveness metric was not. The Overall Equipment
    1 Purpose
    Efficiency metric is a better estimate measure of true
    vides metrics for measuring efficiency assessment of all semiconductor processing
    equipment productivit
    equipment
    2 Scope
    2.6 This standard does not purport to address safety
    if
    Ited with
    2. 1 The document defines metrics and calculations for responsibility of the users of
    is standard to establish
    measurement of equipment productivity
    appropriate safety and health practices and determine
    2.2 In the context of this document, it is important to
    the applicability of regulatory limitations prior to use
    note that"equipment productivity " is impacted greatl
    by factors far beyond the equipment itself, including
    3 Referenced Standards
    (operator, recipe, facilities, material availability, 3.1 SHM Sandards
    scheduling requirements. etc.
    SEMI E- Standard for Definition and Measurement
    2.3 Effective application of this standard requires that of Equipment Reliability, Availability, and
    equipment performance is tracked using the metrics for Maintainability(RAM)
    Equipment Reliability, Availability, and Maintainability SEMI E38-cluster Tool Module Communications
    (RAM) established in SEMI E10. Additionally, the
    Automated
    Reliability
    Availability
    CTMC)
    Maintainability Standard (ARAMS )SEMI E58 can be SEMI E40-standard for Processing Management
    Ised for equpment with ARAMS capability. SEMI E42
    Productivity metrics for flexible-sequence cluster tools
    Recipe Management Standard
    require tracking of SEMI E10 equipment states and
    Concepts, Behavior, and Message Services
    recipes at the level of individual processing modules. SEMI E58-automated Reliability, Availability, and
    Productivity performance of a flexible-sequence cluster Maintainability Standard (ARAMS)
    tool is then calculated as the aggregate productivity Behavior, and Services
    performance of its individual processing modules
    3.2 Other Documen/s
    equipment productivity using Overall Equipment SM 21-closed-oop Measurement_of Equipment
    Efficiency(OEE)as the metric, and does not address
    the impact of productivity changes on cost, cycle time
    Systems Research Center, University of California
    or other measures. This document does not address any
    Berkeley, 1997
    RAM issues over and above those in SEMT E10
    SM 42: Productivity Metrics for Flexible-sequence
    2.5 The previous SEMT E79 Stand ard (SEMI E79-
    Cluster Tools; Engineering Systems Research Center
    0299 )defined measurement of an Overall Equipment
    niversity of California, Berkeley, 1998
    Efectiveness metric. In this revision of SEM E79, the NOTE
    展开阅读全文
    提示  文档分享网所有资源均是用户自行上传分享,仅供网友学习交流,未经上传用户书面授权,请勿作他用。
    关于本文
    本文标题:SEMI E79-0200 STANDARD FOR DEFINITION AND MEASUREMENT OF.pdf
    链接地址:https://www.wdfxw.net/doc32552125.htm
    关于我们 - 网站声明 - 网站地图 - 资源地图 - 友情链接 - 网站客服 - 联系我们

    版权所有:www.WDFXW.net 

    鲁ICP备09066343号-25 

    联系QQ: 200681278 或 335718200

    收起
    展开