SEMI E79-0200 STANDARD FOR DEFINITION AND MEASUREMENT OF.pdf
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SEMI E79-0200
STANDARD FOR DEFINITION AND MEASUREMENT OF EQUIPMENT
PRODUCTIVITY
This standard was technically approved by the Global Metrics Committee and is the direct responsibility of
the North American Metrics Committee. Current edition approved by the North American Regional
Standards Committcc on Dcccmbcr 15, 1999. Initially availablc on SEM Onlinc Fcbruary 2000, to bc
published Fcbruary 2000. Originally published Fcbruary 1999
NOTE This document was rewritten in its entirety in production units, and(2 )the efficiency metric is
2000
applicable to flexible-sequence cluster tools, while the
effectiveness metric was not. The Overall Equipment
1 Purpose
Efficiency metric is a better estimate measure of true
vides metrics for measuring efficiency assessment of all semiconductor processing
equipment productivit
equipment
2 Scope
2.6 This standard does not purport to address safety
if
Ited with
2. 1 The document defines metrics and calculations for responsibility of the users of
is standard to establish
measurement of equipment productivity
appropriate safety and health practices and determine
2.2 In the context of this document, it is important to
the applicability of regulatory limitations prior to use
note that"equipment productivity " is impacted greatl
by factors far beyond the equipment itself, including
3 Referenced Standards
(operator, recipe, facilities, material availability, 3.1 SHM Sandards
scheduling requirements. etc.
SEMI E- Standard for Definition and Measurement
2.3 Effective application of this standard requires that of Equipment Reliability, Availability, and
equipment performance is tracked using the metrics for Maintainability(RAM)
Equipment Reliability, Availability, and Maintainability SEMI E38-cluster Tool Module Communications
(RAM) established in SEMI E10. Additionally, the
Automated
Reliability
Availability
CTMC)
Maintainability Standard (ARAMS )SEMI E58 can be SEMI E40-standard for Processing Management
Ised for equpment with ARAMS capability. SEMI E42
Productivity metrics for flexible-sequence cluster tools
Recipe Management Standard
require tracking of SEMI E10 equipment states and
Concepts, Behavior, and Message Services
recipes at the level of individual processing modules. SEMI E58-automated Reliability, Availability, and
Productivity performance of a flexible-sequence cluster Maintainability Standard (ARAMS)
tool is then calculated as the aggregate productivity Behavior, and Services
performance of its individual processing modules
3.2 Other Documen/s
equipment productivity using Overall Equipment SM 21-closed-oop Measurement_of Equipment
Efficiency(OEE)as the metric, and does not address
the impact of productivity changes on cost, cycle time
Systems Research Center, University of California
or other measures. This document does not address any
Berkeley, 1997
RAM issues over and above those in SEMT E10
SM 42: Productivity Metrics for Flexible-sequence
2.5 The previous SEMT E79 Stand ard (SEMI E79-
Cluster Tools; Engineering Systems Research Center
0299 )defined measurement of an Overall Equipment
niversity of California, Berkeley, 1998
Efectiveness metric. In this revision of SEM E79, the NOTE展开阅读全文

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