SEMI C3.47-95 STANDARD FOR HYDROGEN BROMIDE (HBr), 99.98%.pdf

SEMI C3.47-95
STANDARD FOR HYDROGEN BROMIDE ( HBR),99.98% QUALITY
1 Description
4. 1.1 Detection Limits
Hydrogen Bromide is an irritating and corrosive gas
N2<10 ppb mole/mole
with a sharp, penetrating, suffocating odor. It is color
less and nonflammable but fumes m moist air
02 + Ar <20 ppb mole/mole
CO <20 ppb mole/mole
2 Specifications
CH<10 ppb mole/mole
QUALITY: 99.98%, ASSAY(Total Acidity): 98% min
COっ<10 ppb mole/mole
Instrument Parameters-all components are
Maximum Impurities
Impurities
Acceptable(ppm)
analyzed using two columns and two detectors with a
single injection. (See Figure 1)
Carbon Dioxidc( C0>)
50
Ca
Hydrogen Chloride( HCD)
layesep Db 2.0 m (6 ft )by 3.2 mm(1/8 )O.D. by
Mcthanc( CHA)
15
2.2mm(0.085")I.D
Oxygcn(O2)+ Nitrogcn(N2)
50
Molecular Sieve 5A 2.0 m(6 ft)by 3.2 mm
Water( H2O)(v/v)
(1/8)O D by 2.2 mm(0.085)I D ss or equivalent
TOTAL SPECIFIED
125
(60/80mesh)
IMPURITTES
4.1.2.2 Carrier Flow 40 ml/min He
Iron(Fe)
(by wcight, vapor phasc)
4.1.2.3 Sample Volume 1.0 ML
* An analysis of significant figures has not becn considercd. 4.1.2. 4 Temperalures
The number of significant figurcs will bc bascd on analytical
accuracy and the precision of the provided proccdurc
Dctcctor
100°C
* To bc analyzcd and reportcd(typically 500 ppm)
Column I
40°C
3 Physical Constants(for information only)
o]umn 2
100°C
4.1.3 Calibration tandards 5 ppm(mole/mole )of
Metric Units U.S. Units
each compound of interest including nitrogen, oxygen
carbon monoxide, methane. and carbon dioxide in
Molccular Wcight
80.92
80.92
Boiling Point at 1 atm
66.7
88.1F
Density of gas at 70 F (21.1 C) 3.333 g /L 0.208 1b/ft
4.1.4 Operating Procedares
of the calibration standard in
Specilic gravity or gas
2.7
2.7
the Hayesep column using a gas sample valve. Allow
Critical Prcssurc
85.16 bar 1234.8 psia] the effluent of Hayesep column to enter the Molecular
Critical Temperature
90C
193.6F
Sieve column until after CO has eluted Switch the
switching valve to allow the methane and CO, to elute
4 Analytical Procedures
directly into detector A while oxygen, nitrogen, and
4. 1 Nitrogen, Oxygen, Carbon Monoxide, Methane, CO separate on the molecular sieve column and elute
and Carbon Dioxide-this procedure is for the deter
into detector B. Record retention times and peak areas
mination of nitrogen, oxygen argon, carbon monox
for all peaks. The order of elution from the Haye Sep
ide, methane, and carbon dioxide using a ga
column to detector A is methane and CO, The order
chromatograph with a discharge ionization detector
of elution on the molecular sieve column to detector B
is oxygen, nitrogen, and CO
SEMI C3.47-95@SEMI1993,1996