SEMI C3.20-92 (Reapproved 0999) STANDARD FOR HELIUM (He), IN CYLINDERS.pdf

S E M
SEML C3.20-92(Reapproved 0999
STANDARD FOR HELIUM (He), IN CYLINDERS, 99.9995% QUALITY
This standard was technically reapproved by the Global Gases Committcc and is the dircct rcsponsibility of
the North Amcrican Gascs Commilicc. Current edition approved by thc North Amcrican Rcgional Standards
Committee on April 15, 1999. Initially available on SEMI Online August 1999, to be published September
1999. Originally published in 1982; previously published in 1992
1 Description
4 12 Instrment Parameters
1. I Helium is a rare gas or cryogenic liquid that is 4.1.2.1 Column
inert colorless. odorless and tasteless
Porapak T or Q, 3 m(9.8 ft)by 3 mm(1/8 in )ss
2 Specifications
QUALITY: 99. 9995%
Chromosorb 102, 2 m(6.6 ft )by 3 mm ss
Impurities
Maximum Acceptable or equivalent
Carbon monoxide and carbon
4. 1.2.2 Carrier Flow: 30 ml/min helium
dioxide( CO+CO
Nitrogen (N2)
4.1.2.3 Sample Volume: 0.5 to 2.0 m
Oxygcn(02)
4.1. 2.4 Temperatures
Tolal Hydrocarbons cxprcsscd as
0.5
Detector
280°C
Methane(T'hc)
Column Oven
609C
Watcr(H20)(v/v)
0.5
Mcthanivcr
350°C
TOTAL SPECIFIED IMPURITIES
4.5
4. 13 Calibration Standards-1-10
w An analysis of significant figures has not been considered. The
number of significant figures will be based on analytical accuracy and
carbon monoxide, 1-10 ppm (mole/mole)carbon
the precision of the provided procedure
dioxide balance helium.
4.1.4
ling Proceed
3 Physical Constants (for in formation only
4.1. 4 1 Inject the calibration standard into the column
Metric Units
US Units
ing a gas sampling valve. Record the retention times
and peak areas. Order of elution is carbon monoxide
Molecular weight
4.003
4.003
cardon dioxide
Boili
nl at I at
268.9°C
452.0°F
t the sample to be tested in same mann
Density of gas at 0. kg/m3 0. I13 as the calibration standard. Record the retention times
21.1C(70°F)and1
and peak areas
alm
Spccific gravity of
0.138
0.138
4.1.4.3 Repeat4.1.-4.1
gas at 21. IC and
4.1.4.4 Compare the avera
eak areas of the
atm
calibration standard to that of the helium sample bein
(air= 1
tested. Calculate the concentrations of carbon monoxide
Density of liquid at 124.9 k/m3
7.798Ib/ft3
and carbon dioxide. using the formula below. The result
boiling point
may not exceed the specification in Section 2 of this
Standard
4 Analytical Procedures(See Notes 1, 2
4.1 Carbon Monoxide and Carbon ioxide
Sample Peak Area Concentration Concentration
procedure is for the determination of carbon monoxide Standard Peak Area of Standard of Sample
and carbon dioxide in helium using a ga
chromatograph with a flame ionization detector and
4.2 Nitrogen
This procedure is for the
methanlzer
determination of nitrogen in helium using a gas
chromatograph with a helium ionization detector
4.1. 1 Detection Limit 100 ppb (mole/mole)
SEM C3.20-92@SEMI1982,1999