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类型SEMI F36-0299 GUIDE FOR DIMENSIONS AND CONNECTIONS OF GAS.pdf

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    SEMI F36-0299 GUIDE FOR DIMENSIONS AND CONNECTIONS OF GAS F36 0299
    资源描述:
    SEMI F35-0998
    TEST METHOD FOR ULTRA-HIGH PURITY GAS DISTRIBUTION
    SYSTEM INTEGRATION VERIFICATION USING NON-INVASIVE
    OXYGEN MEASUREMENT
    NOTE: This document that was previously designated as SEMI E7I(Test Method for Ultra-high Purity Gas Dis-
    tribution System Integration Verification Using Non-invasive Oxygen Measurement )has been re-designated as
    SEMI F35
    1 Purpose
    2.5 This test method includes the specification of the
    1.1 This test method defines a procedure to monitor
    uired O, analytical equipment. standard methods
    the integrity of ultra-high purity( UHP)gas distribu- for proper use of the O, analytical equipment, and
    tion systems by detecting the ingress of atmospheric manipulation of the O2 data in identifying atmospheric
    This test method would be used to evaluate an
    leak sources
    active "UHP gas distribution system on a continuous
    basis by using non-invasive O measurement. without
    3 Limitations
    requiring an interruption of the process tools using the 3.1 This test method will only be successful in identi
    UHP gases of interest
    fying the presence and location of leaks from atmo-
    This test method should be used to protect semi
    spheric air using O2 as the tracer gas representative of
    all atmospheric air contaminants(i.e, N2, O2, H2O
    conductor fabrication processes using the UHP gases
    which may be sensitive to contamination by any of the
    CO2). There is no capability to identify cross-contami
    common atmospheric impurities, Such as N2, O2, H2O
    ant species between different UHP gases which only
    contain ultra-low trace levels of O, or outward leaks to
    CO>, before product yield problems develo
    atmosphere
    1.3 This is the first such test method that describes a
    noninvasive leak detection and locating procedure. /t 3.2 This test method will not focus specifically on the
    differs from SEMI FI, which is an invasive technique
    process of detecting the exact location of every possi
    for identifying leak sources using a mass spectrometer
    ble atmospheric air leakage source. Rather, it will
    and a helium tracer as
    describe techniques and examples demonstrating how
    atmospheric air leaks can be reliably identified and
    2 Scope
    located, in general
    2.1 This test method applies to UHP gas distribution
    3 Results from this test method may not ensure that
    systems used in semiconductor manufacturing facili
    other common atmospheric Impurities(e.g, H2O )are
    ties and comparable research and development areas
    below their required specification limits after a leak
    has been identified, corrected, and O, levels have
    2.2 This test method applies to bulk gas distribution returned to normal. For example, since O, diffuses
    systems carrying UHP gases such as N2, Ar, He, H
    nore quickly and has a weaker surface adsorption than
    N2O, SF6, and many halocarbons. In most cases, 02 is H, O, O, will be the first atmospheric impurit.
    present only in ultra-low trace levels(typically less detected. However, H>O will likely be the last atmo
    than 1.0 ppb)
    pheric impurity to be purged out once a leak has been
    2.3 This test method will provide real-time monito
    identified and repaired
    of UHP gas distribution systems, resulting in meaning-34 This test method is not a direct substitution for
    ful system
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