SEMI F36-0299 GUIDE FOR DIMENSIONS AND CONNECTIONS OF GAS.pdf
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SEMI F35-0998
TEST METHOD FOR ULTRA-HIGH PURITY GAS DISTRIBUTION
SYSTEM INTEGRATION VERIFICATION USING NON-INVASIVE
OXYGEN MEASUREMENT
NOTE: This document that was previously designated as SEMI E7I(Test Method for Ultra-high Purity Gas Dis-
tribution System Integration Verification Using Non-invasive Oxygen Measurement )has been re-designated as
SEMI F35
1 Purpose
2.5 This test method includes the specification of the
1.1 This test method defines a procedure to monitor
uired O, analytical equipment. standard methods
the integrity of ultra-high purity( UHP)gas distribu- for proper use of the O, analytical equipment, and
tion systems by detecting the ingress of atmospheric manipulation of the O2 data in identifying atmospheric
This test method would be used to evaluate an
leak sources
active "UHP gas distribution system on a continuous
basis by using non-invasive O measurement. without
3 Limitations
requiring an interruption of the process tools using the 3.1 This test method will only be successful in identi
UHP gases of interest
fying the presence and location of leaks from atmo-
This test method should be used to protect semi
spheric air using O2 as the tracer gas representative of
all atmospheric air contaminants(i.e, N2, O2, H2O
conductor fabrication processes using the UHP gases
which may be sensitive to contamination by any of the
CO2). There is no capability to identify cross-contami
common atmospheric impurities, Such as N2, O2, H2O
ant species between different UHP gases which only
contain ultra-low trace levels of O, or outward leaks to
CO>, before product yield problems develo
atmosphere
1.3 This is the first such test method that describes a
noninvasive leak detection and locating procedure. /t 3.2 This test method will not focus specifically on the
differs from SEMI FI, which is an invasive technique
process of detecting the exact location of every possi
for identifying leak sources using a mass spectrometer
ble atmospheric air leakage source. Rather, it will
and a helium tracer as
describe techniques and examples demonstrating how
atmospheric air leaks can be reliably identified and
2 Scope
located, in general
2.1 This test method applies to UHP gas distribution
3 Results from this test method may not ensure that
systems used in semiconductor manufacturing facili
other common atmospheric Impurities(e.g, H2O )are
ties and comparable research and development areas
below their required specification limits after a leak
has been identified, corrected, and O, levels have
2.2 This test method applies to bulk gas distribution returned to normal. For example, since O, diffuses
systems carrying UHP gases such as N2, Ar, He, H
nore quickly and has a weaker surface adsorption than
N2O, SF6, and many halocarbons. In most cases, 02 is H, O, O, will be the first atmospheric impurit.
present only in ultra-low trace levels(typically less detected. However, H>O will likely be the last atmo
than 1.0 ppb)
pheric impurity to be purged out once a leak has been
2.3 This test method will provide real-time monito
identified and repaired
of UHP gas distribution systems, resulting in meaning-34 This test method is not a direct substitution for
ful system展开阅读全文

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