SEMI C1-0301A SPECIFICATIONS FOR REAGENTS.pdf

semi
SEM C1-0301A
SPECIFICATIONS FOR REAGENTS
This spccification was technically approved by thc Global Proccss Chemicals Committce and is the dircct
responsibility o! thc North Amcrican Proccss Chemicals Committcc Currcnt edition approved by the North
American Regional Standards Commillee on October I7, 1999 and November 22, 2000. Initially available on
SEMI Onlinc Dcccmbcr 2000; to be published March 2001. Originally published in 1980; prcviousl
published in Octobcr 2000
NOTE This document was published twice during the March 2001(0301)publishing cycle
conforming to the tolerances established by Nationa.
1 Preface
Bureau ofsiandards Circular 602, April 1, 1959
the 1950s, chemicals purchased by the 2 2 Abbreviations and Sios
In this work
electronics industry were of a quality defined by the
abbreviations and signs used shall be restricted to those
Committee on Analytical Reagents of the American listed in Table 2. Most of the abbreviations are identical
Chemical Society, or of lesser quality. With recognition to those used in publications of the American Chemical
of the importance of impurity content of chemicals in
Society as of 1982
the manufacture of semiconductors, suppliers
responded by introducing products with improved 2.3 Acidity and Alkalinit
A test for acidity or
analytical characterization, notably for trace elements
alkalinity. or both. of organic liquids is common
1. 2 The SEMI Committee on Stan dards for Chemical 2.3.1 In the acidify es, usually a stated volume of
Reagents began its efforts in the fall of 1975. With this water(commonly 25 ml)is shaken in a glass-stoppered
publication, the Committee establishes the definitions, flask with a stated volume of sample(commonly 10
general procedures, specification
Ivtical ml). Then 0l ml of phenolphthalein indicator solution
procedures for the chemicals listed in the index
is added and 0.01 N sodium hydroxide until a slight
1.3 Products within all of the requirements can be pink color persists after shaking for 30 seconds. Next, a
stated amount of sample is added and mixed, and a
described as"meeting SEMI specifications
titration is performed with 0.01 N sodium hydroxide
4 Where an analytical procedure different from that until the pink color Is reproduced, the volume of titrant
provided is substituted by a suppller or user, the burden required is recorded
OI proor I5 on said suppller or user to confirm the 2.3.2 In the alkalinity test, a stated amount of sample
equivalency
is mixed with a stated volume of water (commonly 25
The committee is continuing work on m). Now 0.05 ml of methyl red indicator solution is
improvement of specifications and procedures and added and the mixture is titrated with 0.01 N
addition of other reagents and systems such as mixed
chants. The committee welcomes comments
ne volume of titrant required is recorder is reached
hydrochloric acid until a slight pink color is reached
suggestions, and recommendations
2.3. 3 The result of such tests has oft en been expressed
6 This standard does not purport to address safety qualitatively as" passes test" or quantitatively as the
issues, if any,
ciated with its use. Tt is the content of an acid (or base)known
umed to be
responsibility of the users of