SEMI C43-0699 SPECIFICATION FOR SODIUM HYDROXIDE, 50% SOLUTION.pdf

SEMI C43-0699
SPECIFICATION FOR SODIUM HYDROXIDE. 50% SOLUTION
This spccification was tcchnicall
ved by the Global Proccss Chemicals Committcc and is the di
responsibility o! whc Norih Amcrican Proccss Chemicals Committcc. Currcnt edition approved by thc North
American Regional Standards Committee on April 23, 1999. Initially available on SEMI Online May 1999
to bc published Junc 1999
minutes
Add 0. 15 ml o
1 Purpose
phenolphthalein indicator solution and titrate with
1. 1 The purpose of this document is to standardize standardized I N hydrochloric acid(Save this solution
requirements for 50% sodium hydroxide solution used for the sodium carbonate test.
in the semiconductor industry and testing procedures to
mL× N of HCI×80.00
support those standards. Test methods have been shown
Assay"Welght of Sample()
to give statistically valid results. This document also
provides guidelines for grades of 50% sodium 8 2 Sodim Carbonate
o the above titrated
hydroxide solution for which a need has been solution, add 0.15 ml of methyl orange indicator and
identified. In the case of the guidelines, the test continue
titration with 1 N hydrochloric acid
methods may not have been statistically validated ye
making sure that no insoluble carbonate remains. The
additional hydrochloric acid is equivalent to that
2 Scope
consumed by the sodium carbonate
2. 1 The scope of this document is all grades of 50%
Na CO= ILXNOF HCIX1060
sodium hydroxide solution used in the semiconductor
s Weight of Sample(g)
Industy
8.3 Ammonium Hydroxide Precipitate- Weigh 20 g
3 Limitations
ble into 250 ml beaker and dissolve in about 100
3. None
ML of water
8.3.1 Cautiously add 15 ML of sulfuric acid to 15 ML
4 Referenced Documents
of water in a 100 ml glass beaker, cool; then cautious
SEMI Ci-specifications for Reagents
add the mixture to the solution of the sample, and
Cool. dissolve the residue
5 Terminology
130 ML of hot water, and add ammonium hydroxide
until the solution is just basic to methyl red
5.1 None
8.3.2 Heat to boiling filter wash with hot water and
6 Physical Property(for information only
ignite. The weight of the residue should not exceed 2
mg
6.1 Not applicable
8. 4 Insoluble Maller- Dilute 50 g of sample in 250
7 Requirements
IL of carbon dioxide-free water in a 500 ml stoppered
7. I The requirements for 50% sodium hydroxide
flask and cool to 25C. The solution should be clear
and colorless. Filter through a tared, medium porosity
solution for Grade 1 are listed in Table
filtering crucible and wash thoroughly with hot water
8 Grade 1 Procedures
Dry the crucible at 105C for I hour, cool and weig
NOTE 1: Each laboratory is responsible for verifying the
the residue. The weight of the residue should not
validity of the method within its own operation
exceed 2.5 mg
5 Stock Soltion for Sections 8.6
h8.13
8.1 Assay -Accurately weigh 70 to 80 g of sample in Add 50 g of sample to 250 ml of carbon dioxide-free
a closed weighing bottle. Trans er to a 500 ml water and dilute with such water to 500 ml. One ml
volumetric flask, dilute in carbon dioxide-free water, contains 0.10 g of sample. Store in a plastic container
coo