SEMI PR3.1-0699 PROPOSED SPECIFICATION FOR SURFACE MOUNT.pdf

SEMI PR3.1-0699
ROPOSED SPECIFICATION FOR SURFACE MOUNT NTERFACE OF
GAS DISTRIBUTION COMPONENTS-COUNTERBORE DESIGN
This specification was technically approved by the Global Pacilities Committee and is the direct
responsibility of the North American Facilities Committee. Current edition approved by the North American
Rcgional Standards Commillcc on Dcccmbcr 18, 1998. Initially availablc on SEM Onlinc April 1999; to bc
published Junc 1999
in Figure
All geometric dimensioning and
1 Purpose
tolerancing complies with ASME Y14.5 and/or the
1. 1 This standard, in conjunction with the main applicable ISO standard
document, establishes the properties and physical NOTE 1: All dimensions are in millimeters unless otherwise
dimensions that define a complete surface mount notcd
interface on the component for the counterbore design. NOTE 2: The centered port in Figure I shall be the inlct port
or all componcnts
2 Scope
2.1 The scope is identical to the main document except wil\ ptical l sgh hole in the center of the counterbore
rough holc is drilled al an angle. In
that it is limited to components which will employ a this
ase, the diameter tolerances shall apply to the major
counterbore design for the sealing interface. This diameter of the elipse
design can be used with metal C-seals or compatible NOTE 4 The small through holc in Figurc I is a lcak check
sealing methodologies
port. It is intended that this mate with a groove on the
substratc which allows acccss to thc scaling arcas
3 Limitations
NOTE 5: The base width requirement in Figure 2 applies to
3. 1 The limitations are detailed in the main document. the end fittings or end plates. The MFC body width has
maximum requirement of 39.3 mm but does not have a
4 Referenced Documents
minimum width requirement
4.1 The reference documents are d etailed in the main 7.3 Sealing Surface Hardness-the sealing surface
document
the bottom of the counterbore )shall have a minimum
hardness of 170 Vickers. Testing shall be done per ISO
5 Terminology
5.1 The terminology is detailed in the main document
NOTE 6: This test will damage the sealing surface and
should be considered destructive in nature
6 Ordering Information
7. 4 Sealing Surface Rouughness-the sealing surface
6.1 The ordering information is detailed in the main (the bottom of the counterbore )shall have a surface
document
roughness of 0.4 micro meters Ra max. Testing shall
ISO4288.
7 Requirements
NOTE 7: This test may damage the sealing surfacc and may
7 1 General
Components must meet all the be destructive in nature
requirements of the main document
Sealing Surface Scratches- The sealing surfac
7.2 Dimensional Reguiremenis-all components
(the bottom of the counterbore) shall
other than mass flow controllers/meters shall meet the
lateral scratches which are visible to non-magnified
requirements outlined in Figure
OW
normal vision
controllers/meters shall meet the requirements outlined
SEM PR3.1-0699@ SEM 1998