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类型SEMI E82-0301SPECIFICATION FOR INTERBAYINTRABAY AMHS SEM(.pdf

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    SEMI E82-0301SPECIFICATION FOR INTERBAYINTRABAY AMHS SEM E82 0301 SPECIFICATION SEM
    资源描述:
    sem
    SEM =82-0301
    SPECIFICATION FOR INTERBAY/INTRABAY AMHS SEM(BSEM)
    This standard was technically approved by thc Global Information &Control Committce and is the dircct
    responsibilily of the North Amcrican Information Control Committce. Currcnt edition approved by thc
    JapaneseRegionalStandardsCommilleeonDecemberI,2000.Initiallyavailableatwww.semi.orgFebruar
    2001; to bc published March 200 1. Originally published Scplcmbcr 1999
    This document replaces SEMI E30.4 in its entirety
    1 Purpose
    2.3 This standard does not purport to address safety
    issues, if any, associated with its use. It is the
    1. 1 This standard establishes a Specific Equipment responsibility of the users of this standard to establish
    Model (SEM) for interbay and intrabay AMHS
    te safety and health
    nd determine
    transport equipment (BSEM). The model consists of the applicability of re ulatory limitations prior to use
    equipment characteristics and behaviors that are to be
    implemented in addition to the SEMI E30 fundamental 3 Limitations
    requirements and selected additional capabilities. The
    intent of this standard is to facilitate the integration of
    3.1 Eva/ation Of SEMI E32 (MM)
    TBSEM equipment into an automated (e.g
    The concepts defined in SEMI E32 were
    semiconductor fabrication and flat panel display)analyzed and included where applicable to the TBSEM
    actory. This document accomplishes this by defining but the GEM model was used as the basis for 1BSEM
    an operational model for TBSEM equipment as viewed requirements definition
    by a factory automation controller ( Host). This
    definition provides a standard host interface and
    3.2 Interbay and Intrabay Amlis Transport
    equipment operational behavior (e.g, control, state
    equipmen/ Types
    models, data reports, and reporting levels).Several 3.2.1 This standard is targeted at the different types of
    topics require additional activity that are within the 300 mm and interbay and intrabay AMHS transport
    scope of this standard: traffic ma
    equipment. The term /BS/M equipmemt refers to al
    characteristics (queuing), parallel intertace for carrier types of transport equipment. The equipment types
    transfer (SEMI E23), transport system controller have fundamental mechanical differences
    architecture, and delivery of the transfer unit
    3.2.1.1 Overhead Hoist Transport (OH T)
    2 Scope
    overhead rail guided transport system positioned for
    vertical access to SEMI E15.1 compliant ports
    1 The scope of this standard is limited to the usage
    and description of interbay and intrabay AMHS 3.2.1.2 Oer Head Shutle(Ohs-an overhead rail
    transport equipment(OHT, OHS, RGT, AGT, DWC)as
    guided transport system (monorail)positioned for
    perceived by a SEM Equipment Communications
    access to stocker automated interbay input and output
    Standard 2(SECS-II)host that complies with the GEM ports. The OHS vehicle may or may not contain a
    model (as specified in Section 13 ). It defines the view
    transfer agent
    f the
    at through the SECS comm
    3.2.1.3 Rail Guided / por (RG1-A ground
    link. It does not detine the internal operation of the based rail guided transport system positioned for access
    equipment. It includes a specific transfer command to SEMI E15. 1 compliant ports
    state model and transport system co
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