SEMI E82-0301SPECIFICATION FOR INTERBAYINTRABAY AMHS SEM(.pdf
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sem
SEM =82-0301
SPECIFICATION FOR INTERBAY/INTRABAY AMHS SEM(BSEM)
This standard was technically approved by thc Global Information &Control Committce and is the dircct
responsibilily of the North Amcrican Information Control Committce. Currcnt edition approved by thc
JapaneseRegionalStandardsCommilleeonDecemberI,2000.Initiallyavailableatwww.semi.orgFebruar
2001; to bc published March 200 1. Originally published Scplcmbcr 1999
This document replaces SEMI E30.4 in its entirety
1 Purpose
2.3 This standard does not purport to address safety
issues, if any, associated with its use. It is the
1. 1 This standard establishes a Specific Equipment responsibility of the users of this standard to establish
Model (SEM) for interbay and intrabay AMHS
te safety and health
nd determine
transport equipment (BSEM). The model consists of the applicability of re ulatory limitations prior to use
equipment characteristics and behaviors that are to be
implemented in addition to the SEMI E30 fundamental 3 Limitations
requirements and selected additional capabilities. The
intent of this standard is to facilitate the integration of
3.1 Eva/ation Of SEMI E32 (MM)
TBSEM equipment into an automated (e.g
The concepts defined in SEMI E32 were
semiconductor fabrication and flat panel display)analyzed and included where applicable to the TBSEM
actory. This document accomplishes this by defining but the GEM model was used as the basis for 1BSEM
an operational model for TBSEM equipment as viewed requirements definition
by a factory automation controller ( Host). This
definition provides a standard host interface and
3.2 Interbay and Intrabay Amlis Transport
equipment operational behavior (e.g, control, state
equipmen/ Types
models, data reports, and reporting levels).Several 3.2.1 This standard is targeted at the different types of
topics require additional activity that are within the 300 mm and interbay and intrabay AMHS transport
scope of this standard: traffic ma
equipment. The term /BS/M equipmemt refers to al
characteristics (queuing), parallel intertace for carrier types of transport equipment. The equipment types
transfer (SEMI E23), transport system controller have fundamental mechanical differences
architecture, and delivery of the transfer unit
3.2.1.1 Overhead Hoist Transport (OH T)
2 Scope
overhead rail guided transport system positioned for
vertical access to SEMI E15.1 compliant ports
1 The scope of this standard is limited to the usage
and description of interbay and intrabay AMHS 3.2.1.2 Oer Head Shutle(Ohs-an overhead rail
transport equipment(OHT, OHS, RGT, AGT, DWC)as
guided transport system (monorail)positioned for
perceived by a SEM Equipment Communications
access to stocker automated interbay input and output
Standard 2(SECS-II)host that complies with the GEM ports. The OHS vehicle may or may not contain a
model (as specified in Section 13 ). It defines the view
transfer agent
f the
at through the SECS comm
3.2.1.3 Rail Guided / por (RG1-A ground
link. It does not detine the internal operation of the based rail guided transport system positioned for access
equipment. It includes a specific transfer command to SEMI E15. 1 compliant ports
state model and transport system co展开阅读全文

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