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类型SEMI E4-0699 SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER.pdf

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    SEMI E4-0699 EQUIPMENT COMMUNICATIONS STANDARD MESSAGE TRANSFER E4 0699
    资源描述:
    S E M
    SEM E4-0699
    SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE
    TRANSFER (SECS-)
    technically approved by the Global nformation & Control C
    responsibility of the North American In formation Control Committee. Current edition approved by the
    North Amcrican Rcgional Standards Committcc on Fcbruary 28, 1999. nitially availablc on SEM Onlinc
    May 1999; to be published Junc 1999. Originally published in 1980 prcviously published January 1999
    1 ntroduction
    1.3.3 Network Suppor-The method by which
    blocks of data are routed to a piece of equipment or find
    1. 1 Revision History-this is the first major revision their way back to the proper host application is not
    since the original release of SECS-I in 1980. Very little specified by SECS-I. In a network, the roles of host and
    of the original intent of SECS-I has been altered, equipment might be assumed by any party in the
    though there are a few significant additions. The network. In this situation. one end of the
    changes are summarized in Appendix 1. This communications link must assume the role of the
    specification has been developed in cooperation with equipment and the other the role of the host
    the Japan Electronic Industry Development Association
    1. 4 Applicable ]e
    len/s
    Committee 1 2 on Equipment Communications
    The SECS-I standard define
    1.4 1 Electronics Industries Associa tion Standards
    communication interface suitable for the exchange of ELA RS-232-C- Interface between Data Terminal
    messages between semiconductor processing equipment Equipment and Data Communication Equipment
    miconductor processing equipment
    Employing Serial Binary Data Interchange
    includes equipment intended for wafer manufacturing, ELA R$ -Synchronous Signaling Rates for
    wafer processing, process measuring, assembly and
    Data Transmission
    packaging. A host is a computer or network of
    computers which exchange information with the ELA RS-334 - Signal Quality at Interface Between
    equipment to accomplish manufacturing. This standard Data Processing Terminal Equipment and Synchronous
    includes the description of the physical connector, Communication Equipment for Serial Data
    signal levels, data rate and logical protocols required to Transmission
    exchange messages between the host and equipment ETA RS-422
    Electrical Characteristics of Balanced
    over a serial point-to-point data path. This standard Vo kage Digital Interface Circuits
    does not define the data contained within a messa
    The meaning of messages must be determined through EIA RS-423
    Electrical Characteristics of
    some message content standard such as SEMI Unbalanced Voltage Digital Interface Circuits
    Equipment Communications Standard E5(SECS-I)
    1.4.2 uropean Compuler Manufac/airing Association
    ndard provides a means
    independent manufacturers to produce equipment
    ECMA/TC24/82/18-NETWORK Layer Principles,
    and/or hosts which can be connected without requiring
    Final Draft(April, 1982
    specific knowledge of each other
    1.4.3 Japanese Industrial Standards Committees
    1.3. 1 Layered Protocol-the SECS-I protocol can IS C 6361 -The Interface between Data Circuit
    be thought of as a layered protocol used for point-to-terminating Equipment(DCE) and Data Terminal
    point communication. The levels within SECS-I are the Equipme
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