SEMI E4-0699 SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER.pdf
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S E M
SEM E4-0699
SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE
TRANSFER (SECS-)
technically approved by the Global nformation & Control C
responsibility of the North American In formation Control Committee. Current edition approved by the
North Amcrican Rcgional Standards Committcc on Fcbruary 28, 1999. nitially availablc on SEM Onlinc
May 1999; to be published Junc 1999. Originally published in 1980 prcviously published January 1999
1 ntroduction
1.3.3 Network Suppor-The method by which
blocks of data are routed to a piece of equipment or find
1. 1 Revision History-this is the first major revision their way back to the proper host application is not
since the original release of SECS-I in 1980. Very little specified by SECS-I. In a network, the roles of host and
of the original intent of SECS-I has been altered, equipment might be assumed by any party in the
though there are a few significant additions. The network. In this situation. one end of the
changes are summarized in Appendix 1. This communications link must assume the role of the
specification has been developed in cooperation with equipment and the other the role of the host
the Japan Electronic Industry Development Association
1. 4 Applicable ]e
len/s
Committee 1 2 on Equipment Communications
The SECS-I standard define
1.4 1 Electronics Industries Associa tion Standards
communication interface suitable for the exchange of ELA RS-232-C- Interface between Data Terminal
messages between semiconductor processing equipment Equipment and Data Communication Equipment
miconductor processing equipment
Employing Serial Binary Data Interchange
includes equipment intended for wafer manufacturing, ELA R$ -Synchronous Signaling Rates for
wafer processing, process measuring, assembly and
Data Transmission
packaging. A host is a computer or network of
computers which exchange information with the ELA RS-334 - Signal Quality at Interface Between
equipment to accomplish manufacturing. This standard Data Processing Terminal Equipment and Synchronous
includes the description of the physical connector, Communication Equipment for Serial Data
signal levels, data rate and logical protocols required to Transmission
exchange messages between the host and equipment ETA RS-422
Electrical Characteristics of Balanced
over a serial point-to-point data path. This standard Vo kage Digital Interface Circuits
does not define the data contained within a messa
The meaning of messages must be determined through EIA RS-423
Electrical Characteristics of
some message content standard such as SEMI Unbalanced Voltage Digital Interface Circuits
Equipment Communications Standard E5(SECS-I)
1.4.2 uropean Compuler Manufac/airing Association
ndard provides a means
independent manufacturers to produce equipment
ECMA/TC24/82/18-NETWORK Layer Principles,
and/or hosts which can be connected without requiring
Final Draft(April, 1982
specific knowledge of each other
1.4.3 Japanese Industrial Standards Committees
1.3. 1 Layered Protocol-the SECS-I protocol can IS C 6361 -The Interface between Data Circuit
be thought of as a layered protocol used for point-to-terminating Equipment(DCE) and Data Terminal
point communication. The levels within SECS-I are the Equipme展开阅读全文

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