SEMI F49-0200 GUIDE FOR SEMICONDUCTOR FACTORY SYSTEMS VOLTAGE.pdf

SEMI F49-0200
GUIDE FOR SEMICONDUCTOR FACTORY SYSTEMS VOLTAGE SAG
IMMUNITY
This guide was technically approved by the Global Facilities Committee and is the direct responsibility of the
North American Facilities Committee. Current edition approved by the North American Regional Standards
Committcc on Dcccmbcr 15, 1999. nitially availablc on SEMI Onlinc Fcbruary 2000; to bc published.
Fcbruary 2000
Purpose
Quantifying process equipment performance(see
1. 1 A guide defining a systems ap proach to power
Section 7. 3)
conditioning is needed for semiconductor and flat panel Quantifying support equipment and facilities
display (FPD) facilities. Semiconductor and FPD
infrastructure equipment performance (see Section
factories require high levels of power quality due to the
7,.4)
sensitivity of equipment and process controls
Semiconductor and FPD processing equipment is
Utility power monitoring strategies (see Section
especially vulnerable to voltage sags. The facility
electrical system distributes power to process
d facilit
Measurement and modeling strategies(see Section
7.6
infrastructure equipment. Facility electrical distribution
systems should be designed to integrate the voltage sag Power enhancing and conditioning strategies for
susceptibility of all the equipment with the power
use in the facilities electrical distribution system
quality supplied by the utility. Installing effective and
(see Section 7.7)
efficient facilities power conditioning requires 2.3 This guide do
es not
ort to address safety
entification of appropriate conditioning technologies
if any, associated
its use. It is the
and properly applying the conditioning equipment
responsibility of the users of this guide to establish
1. 2 Utilizing recommendations in this guide should appropriate safety and health practices and determine
result in effective power conditioning of the facility the applicability of regulatory limitations prior to use
electrical distribution system such that the process
equipment, associated support equipment and facilities 3 Limitations
infrastructure equipment function within acceptable
3.1 This guide addresses power qu ality monitoring and
conditioning solutions primarily within the facilitie
electrical distribution system. Process equipment and
2 Scope
utility performance are covered in other related
2.1 This guide is intended for facilities engineers, standards
equpment engineers, and facilities managers who 3.2 This guide does not address the impact of voltage
specify compatibility requirements for equipment and
sags on equipment beyond the effect to the electrical
requirements such as those found in SEMT E51
components. Effects on interdependent equipment
interlocks are not examined in detail in this document
2.2 This document provides recom mendations for 3.3 This guide is not intended to address design or
implementing a systems approach to identification and
materials issues related to safety which are addressed
resolution of voltage sag events that disturb the elsewhere in the SEMI guidelines(see SEMT S2)
performance of semiconductor process equipment. A
program recommending facilities electrical distribution 3.4 This document is not intended to